Experimentation and analysis of soft x-ray grazing incidence optical scattering phenomena

Shu-yan Chen; Li Cheng; Xin-jun Xu

doi:10.1117/12.904732

30 November 2011 Experimentation and analysis of soft x-ray grazing incidence optical scattering phenomena

Shu-yan Chen, Li Cheng, Xin-jun Xu

Proceedings Volume 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems; 820118 (2011) https://doi.org/10.1117/12.904732
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

The optical performance is severely degraded by surface scattering effects, especially for short wavelength imaging systems. Surface scattering effects is one of important factors degrading imaging performance. Study of non-intuitive surface scatter effects resulting from practical optical fabrication tolerances is a necessary work for optical performance evaluation of high resolution imaging systems. In this paper, surface scattering numerical model of grazing incidence imaging systems is discussed at first. Then Soft X-ray optical scattering distribution is measured by a soft X-ray reflectometer, for different sample mirrors, wavelength and grazing angle. By dealing with experimental data, different factors effects on surface scattering, such as glancing angle, wavelength and roughness is computed and analysised. It is indicated that the scattering increases as the grazing angle increases, surface roughness increases and the wavelength decreases, and optical system performance decreases.

Citation Download Citation

Shu-yan Chen, Li Cheng, and Xin-jun Xu "Experimentation and analysis of soft x-ray grazing incidence optical scattering phenomena", Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 820118 (30 November 2011); https://doi.org/10.1117/12.904732

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available