Laser surface structuring with long depth of focus

Andreas Michalowski; Christian Freitag; Rudolf Weber; Thomas Graf

doi:10.1117/12.881189

21 February 2011 Laser surface structuring with long depth of focus

Andreas Michalowski, Christian Freitag, Rudolf Weber, Thomas Graf

Proceedings Volume 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI; 79200W (2011) https://doi.org/10.1117/12.881189
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Theoretical and experimental results concerning the use of axicons for laser-ablation are reported. Analytical formulas allow to predict the generated fluence distributions and the expected ablation widths. The influence of an imperfect axicon tip is discussed. The long depth of focus of the generated beam enables easy small-sized laser marking in dimension of the laser wavelength.

Citation Download Citation

Andreas Michalowski, Christian Freitag, Rudolf Weber, and Thomas Graf "Laser surface structuring with long depth of focus", Proc. SPIE 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI, 79200W (21 February 2011); https://doi.org/10.1117/12.881189

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