Analysis of near field microwave and conventional optical images

Guillermo López-Maldonado; Naser Qureshi; Hesiquio Vargas-Hernández; César L. Ordóñez-Romero; M. Avendaño-Alejo; Oleg V. Kolokoltsev

doi:10.1117/12.903423

2 November 2011 Analysis of near field microwave and conventional optical images

Guillermo López-Maldonado, Naser Qureshi, Hesiquio Vargas-Hernández, César L. Ordóñez-Romero, M. Avendaño-Alejo, Oleg V. Kolokoltsev

Author Affiliations +

Proceedings Volume 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World; 801187 (2011) https://doi.org/10.1117/12.903423
Event: International Commission for Optics (ICO 22), 2011, Puebla, Mexico

Abstract

In this work we present near field microwave images of microelectronic circuits and their interpretation to complement the conventional optical analysis. We show a highly simplified design of a resonant probe with dynamically tunable capacitive coupling and with high sensitivity. Images were obtained by measuring the microwave reflection coefficient operating a 7 GHz. This design represents a simplified and highly effective approach to implementing near field microwave microscopy.

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Guillermo López-Maldonado, Naser Qureshi, Hesiquio Vargas-Hernández, César L. Ordóñez-Romero, M. Avendaño-Alejo, and Oleg V. Kolokoltsev "Analysis of near field microwave and conventional optical images", Proc. SPIE 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World, 801187 (2 November 2011); https://doi.org/10.1117/12.903423

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