Table top nanopatterning by de-magnified Talbot effect using a capillary discharge soft x-ray laser

L. Urbanski; P. Wachulak; A. Isoyan; C. S. Menoni; J. J. Rocca; M. Marconi

doi:10.1117/12.892855

5 October 2011 Table top nanopatterning by de-magnified Talbot effect using a capillary discharge soft x-ray laser

L. Urbanski, P. Wachulak, A. Isoyan, C. S. Menoni, J. J. Rocca, M. Marconi

Proceedings Volume 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX; 81400T (2011) https://doi.org/10.1117/12.892855
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Reduced replicas of a periodic transparent mask were printed in the surface of a photoresist using Talbot effect. The transparent mask (or Talbot mask) was composed of an array of unit tiles distributed in a square matrix. The mask was illuminated by a coherent table top soft X-ray laser. To achieve the demagnification effect, the illumination beam was reflected in a spherical mirror. At determined positions given by the Talbot distance reduced replicas of the mask were obtained. The Talbot images produced smaller copies of the mask in the surface of a photoresist. Calculations based on Kirchhoff-Fresnel theory shows a good agreement with the experimental results. The limitations for this method are further discussed.

Citation Download Citation

L. Urbanski, P. Wachulak, A. Isoyan, C. S. Menoni, J. J. Rocca, and M. Marconi "Table top nanopatterning by de-magnified Talbot effect using a capillary discharge soft x-ray laser", Proc. SPIE 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX, 81400T (5 October 2011); https://doi.org/10.1117/12.892855

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