Dr. Carmen S. Menoni Profile

Dr. Carmen S. Menoni

Professor at Colorado State Univ

SPIE Involvement:

Conference Chair | Editor | Author

Publications (96)

Proceedings Article | 24 November 2023 Poster

Poster

Short pulse laser damage of HfO2/SiO2 antireflection coatings at 1030 nm wavelength

Aamir Mushtaq, Enam Chowdhury, Gulsum Salman, Egidijus Pupka, Austėja Aleksiejūtė, Justinas Galinis, Andrius Melninkaitis, Samuel Castro Lucas, Maxwell Weiss, Carmen Menoni, Emma DeAngelis, Mohamed Yaseen Noor

Proceedings Volume PC12726, PC127260Y (2023) https://doi.org/10.1117/12.2685287

KEYWORDS: Antireflective coatings, Laser damage threshold, Silica, Laser induced damage, Mixtures, Pulse signals, Picosecond phenomena, Laser applications, Sputter deposition, Simulations

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Proceedings Article | 24 November 2023 Presentation

Presentation

Ultrafast laser damage on SiO2/HfO2 multilayer dielectric mirrors reveals amorphous to crystalline phase transformation

Mohamed Yaseen Noor, Simin Zhang, Aaron Davenport, Carmen Menoni, Enam Chowdhury, Conrad Kuz, Gabriel Calderon, Jinwoo Hwang, Emma DeAngelis

Proceedings Volume PC12726, PC127260K (2023) https://doi.org/10.1117/12.2685130

KEYWORDS: Multilayers, Crystals, Ultrafast lasers, Laser crystals, Dielectric mirrors, Transmission electron microscopy, Laser irradiation, Ultrafast phenomena, Laser systems engineering, Laser optics

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Proceedings Article | 24 November 2023 Presentation

Presentation

Amorphous oxide mixtures and nanolaminates for coatings of gravitational wave detectors

Carmen Menoni

Proceedings Volume PC12726, PC127260L (2023) https://doi.org/10.1117/12.2690317

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Proceedings Article | 8 June 2023 Presentation

Presentation

EUV laser ablation mass spectrometry for probing chemical information down to the nanoscale

Lydia Rush, Andrew Duffin, Carmen Menoni

Proceedings Volume PC12582, PC125820G (2023) https://doi.org/10.1117/12.2664249

KEYWORDS: Extreme ultraviolet, Laser ablation, Spectroscopy, Mass spectrometry, Uranium, Laser spectroscopy, Ionization, Chemical analysis, Thorium, Spatial resolution

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Proceedings Article | 8 June 2023 Presentation

Presentation

Mass spectrometry of ion emission from covalent and molecular solids ablated by nanosecond EUV laser pulses used for focused-beam characterization

Ludek Vyšín, Jaromír Chalupský, Věra Hájková, Zuzana Kuglerová, Lydia Rush, Libor Juha, Jorge Rocca, Carmen Menoni, Ladislav Fekete

Proceedings Volume PC12582, PC125820F (2023) https://doi.org/10.1117/12.2666755

KEYWORDS: Extreme ultraviolet, Molecular lasers, Mass spectrometry, Laser ablation, Solids, Molecular spectroscopy, Ions, Spectroscopy, Polymethylmethacrylate, Materials processing

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Proceedings Article | 3 December 2022 Presentation

Presentation

Experimental investigations of femto-second laser induced damage on multi-layer dielectric mirrors

Mohamed Yaseen Noor, Emma DeAngelis, Conrad Kuz, Simin Zhang, Carmen Menoni, Enam Chowdhury, Aaron Davenport

Proceedings Volume PC12300, PC123000N (2022) https://doi.org/10.1117/12.2642692

KEYWORDS: Laser induced damage, Dielectric mirrors, Laser systems engineering, Optical coatings, Mirrors, High power lasers, Ultrafast lasers, Sputter deposition, Reflectors, Optical components

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Proceedings Article | 12 October 2021 Poster + Presentation

Poster + Presentation

Simulation of femtosecond laser induced electron excitation in a Multi-Layer Dielectric (MLD) grating

Joseph Smith, Simin Zhang, Emily Dalton, Aaron Davenport, Carmen Menoni, Vitaly Gruzdev, Enam Chowdhury

Proceedings Volume 11910, 119101H (2021) https://doi.org/10.1117/12.2597749

KEYWORDS: Dielectrics, Optical simulations, Femtosecond phenomena, Laser induced damage, Silica, Optical design, Diffraction gratings, Ultrafast lasers, Photonics, Multilayers

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Proceedings Article | 8 July 2021 Open Access

Open Access

Paper

Demonstration of Multi-Hz repetition rate x-ray lasers at shorter wavelengths

J. J. Rocca, A. Rockwood, Y. Wang, S. Wang, M. Berrill, V. N. Shlyaptsev, H. Bravo, C. S. Menoni

Proceedings Volume 11886, 1188606 (2021) https://doi.org/10.1117/12.2595362

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Proceedings Article | 8 July 2021 Open Access

Open Access

Paper

Time-of-flight mass spectrometry to determine plasma temperature from ablated target surfaces

Erik Wagenaars, Greg Tallents, Lydia Rush, Carmen Menoni, Jorge Rocca, Eduardo Solís Meza

Proceedings Volume 11886, 1188610 (2021) https://doi.org/10.1117/12.2593349

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Proceedings Article | 8 July 2021 Open Access

Open Access

Paper

Imaging isotopic content at the nanoscale using extreme ultraviolet laser ablation and ionization mass spectrometry

Lydia Rush, John Cliff, Dallas Reilly, Andrew Duffin, Carmen Menoni

Proceedings Volume 11886, 118860Z (2021) https://doi.org/10.1117/12.2593315

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Proceedings Article | 8 July 2021 Open Access

Open Access

Paper

Single-shot picosecond resolution Fourier transform holographic microscopy with large field of view using a compact soft x-ray laser

Shoujun Wang, Alex Rockwood, Yong Wang, Wei-Lun Chao, Patrick Naulleau, Huanyu Song, Carmen Menoni, Mario Marconi, Jorge Rocca

Proceedings Volume 11886, 118860O (2021) https://doi.org/10.1117/12.2594832

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Proceedings Article | 9 November 2020 Poster + Presentation + Paper

Poster + Presentation + Paper

2D dynamic ionization simulation from ultrashort pulses in multilayer dielectric interference coatings

Simin Zhang, Carmen Menoni, Noah Talisa, Aaron Davenport, Vitaly Gruzdev, Enam Chowdhury, Joseph Smith

Proceedings Volume 11514, 115141T (2020) https://doi.org/10.1117/12.2571081

KEYWORDS: Ionization, Ultrafast phenomena, Multilayers, Dielectrics, Multilayer interference, Thin films, Thin film coatings, Absorption, Ultrafast lasers, Particles

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Proceedings Article | 11 September 2020 Poster + Presentation

Poster + Presentation

Laser induced damage threshold improvements by surface modification

Rytis Buzelis, Kestutis Juškevicius, Aaron Davenport, Hanchen Wang, Emmett Randel, Carmen Menoni

Proceedings Volume 11514, 1151424 (2020) https://doi.org/10.1117/12.2571889

KEYWORDS: Polishing, Laser induced damage, Laser damage threshold, Surface finishing, Plasma treatment, Abrasives, Absorption, Laser applications, Laser optics, Atomic force microscopy

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Proceedings Article | 20 November 2019 Presentation + Paper

Presentation + Paper

Single-shot femtosecond laser-induced damage and ablation of HfO2/SiO2- based optical thin films: a comparison between few-cycle pulses and 110 fs pulses

Noah Talisa, Michael Tripepi, Abdallah AlShafey, Brandon Harris, Jake Krebs, Aaron Davenport, Emmett Randel, Carmen Menoni, Enam Chowdhury

Proceedings Volume 11173, 111730U (2019) https://doi.org/10.1117/12.2536423

KEYWORDS: Hybrid fiber optics, Thin films, Plasma, Laser ablation, Laser induced damage, Femtosecond phenomena, Picosecond phenomena, Laser damage threshold, Reflectivity, Silica, Image transmission

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Proceedings Article | 9 September 2019 Presentation + Paper

Presentation + Paper

Extreme ultraviolet laser ablation of solid targets

S. Wilson, J. Lolley, V. Aslanyan, A. West, A. Rossall, E. Solis-Meza, E. Wagenaars, C. Menoni, J. Rocca, G. Tallents

Proceedings Volume 11111, 1111106 (2019) https://doi.org/10.1117/12.2528736

KEYWORDS: Laser ablation, Mirrors, Plasma, Capillaries, Extreme ultraviolet, Spherical lenses, Laser applications, Laser optics, Off axis mirrors

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Proceedings Article | 9 September 2019 Presentation

Presentation

Extreme ultraviolet laser ablation mass spectrometry: probes chemical composition at the nanoscale (Conference Presentation)

Carmen Menoni

Proceedings Volume 11086, 110860R (2019) https://doi.org/10.1117/12.2529814

KEYWORDS: Extreme ultraviolet, Laser ablation, Mass spectrometry, Multispectral imaging, Molecular lasers, 3D image processing, Molecular spectroscopy, Ions, Plasma, Spectroscopy

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Proceedings Article | 9 September 2019 Presentation

Presentation

Extending the capabilities of plasma-based soft x-ray lasers (Conference Presentation)

Hanchen Wang, Yong Wang, Shoujun Wang, Alex Rockwood, Vyacheslav Shlyaptsev, Mark Berrill, Cory Baumgarten, Alexander Meadows, Brendan Reagan, Gabriel Murray, Herman Bravo, Kristian Dehne, Mario Marconi, Jorge Rocca, Carmen Menoni

Proceedings Volume 11111, 1111102 (2019) https://doi.org/10.1117/12.2534669

KEYWORDS: X-ray lasers, Ultrafast phenomena, Solid state lasers, Energy efficiency, Gadolinium, Terbium, Dysprosium

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Proceedings Article | 9 September 2019 Presentation

Presentation

Nanoscale isotopic imaging and trace analysis by extreme ultraviolet laser ablation mass spectrometry (Conference Presentation)

Carmen Menoni, Lydia Rush, Ilya Kuznetsov, Andrew Duffin, Jorge Rocca

Proceedings Volume 11111, 1111108 (2019) https://doi.org/10.1117/12.2533354

KEYWORDS: Extreme ultraviolet, Laser ablation, Mass spectrometry, 3D image processing, Molecular lasers, Molecular spectroscopy, Ions, Plasma, Spectroscopy, Statistical analysis

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Proceedings Article | 9 September 2019 Paper

Paper

Rapid quasi non-destructive 3D chemical visualization with tabletop x-ray laser mass spectrometry

Davide Bleiner, Carmen Menoni, Jorge Rocca, Lydia Rush

Proceedings Volume 11111, 1111107 (2019) https://doi.org/10.1117/12.2528160

KEYWORDS: Visualization, Chemical analysis, Extreme ultraviolet, Mass spectrometry

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Proceedings Article | 4 March 2019 Presentation + Paper

Presentation + Paper

Photothermal microscopy characterization of multiphoton annealing of defects in thin-film coatings for high-power lasers

Oscar Martínez, Facundo Zaldívar Escola, Nélida Míngolo, Carmen Menoni, Jorge Rocca

Proceedings Volume 10925, 1092509 (2019) https://doi.org/10.1117/12.2508904

KEYWORDS: Absorption, Laser beam diagnostics, Sensors, Thin films, Thermal effects, Annealing, Thin film coatings

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Proceedings Article | 26 November 2018 Presentation

Presentation

Laser damage of Yb:YAG active mirrors under atmospheric, vacuum, and cryogenic conditions (Conference Presentation)

Hanchen Wang, Alexander Meadows, Elzbieta Jankowska, Brendan Reagan, Jorge Rocca, Carmen Menoni

Proceedings Volume 10805, 1080514 (2018) https://doi.org/10.1117/12.2501564

KEYWORDS: Disk lasers, Cryogenics, Laser induced damage, Picosecond phenomena, Laser amplifiers, Optical amplifiers, Crystals, Multilayers, Dielectrics, Reflection

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The demonstration of a Yb:YAG chirped pulse amplification laser producing 1 J, 5 ps pulses at 500 Hz repetition rate [1] and recently 1 J pulses at 1 kHz repetition rate [2] relied on efficient thermal management and high performance multilayer dielectric coatings on the laser amplifier active mirrors. In the active mirror configuration, the Yb:YAG amplifier crystals use HfO2/SiO2 multilayer dielectric anti-reflection (AR) and high reflection (HR) coatings. The Joule-level amplifier is operated in vacuum and at liquid nitrogen boiling temperature (77 K) with 1030 nm, 220 ps duration laser pulses making four reflections from each HR coating and 8 passes through each AR coating. The LIDT performance of these coatings is crucial to the future scaling of these amplifiers. In this work we describe results of an investigation of the laser induced damage threshold (LIDT) of Yb:YAG active mirror laser amplifier disks at atmospheric, vacuum and cryogenic temperature conditions. The measurements were conducted for 220 ps pulses, the typical pulse duration of stretched pulses we are using to implement kW-class average power CPA laser amplifiers [1,2]. We measured the 1-on-1 (single-shot) and 3000-on-1 LIDT on Yb:YAG crystals with and without the coatings. The results show that the LIDT for single shot damage occurs near 20 J/cm2, and 100% damage probability occurs near 29 J/cm2 for either the uncoated or coated Yb:YAG crystal at atmospheric conditions. Similar results were obtained in the vacuum and cryogenic temperatures tests. This leads to the conclusion that the Yb:YAG material itself, and not the coatings, is the limiting factor in the LIDT. This work was performed under the auspices of the U.S. Department of Energy, Office of High Energy Physics, Accelerator Stewardship Program under Award DE-SC0016136. References [1] C. Baumgarten, M. Pedicone, H. Bravo, H. Wang, L. Yin, C. S. Menoni, J. J. Rocca, and B. A. Reagan, Optics Letters 41, 3339 (2016). [2] Brendan A Reagan, Cory Baumgarten, Elzbieta Jankowska, Han Chi, Herman Bravo, Kristian Dehne, Michael Pedicone, Liang Yin, Hanchen Wang, Carmen S Menoni, Jorge J Rocca, High Power Laser Science and Engineering 6, e11 (2018).

Proceedings Article | 13 November 2017 Paper

Paper

A method for the determination of defect density from standard damage frequency measurements

Jonathan Arenberg, Carmen Menoni

Proceedings Volume 10447, 104471R (2017) https://doi.org/10.1117/12.2280611

KEYWORDS: Standards development, Laser damage threshold, Tolerancing, Gaussian beams, Data modeling

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Proceedings Article | 13 November 2017 Paper

Paper

Testing the limits of the Stoney Equation for assessing stress in thin films from interferometric wavefront deformation measurements

E. Jankowska, C. Menoni, Yang Le

Proceedings Volume 10447, 104472E (2017) https://doi.org/10.1117/12.2282278

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Proceedings Article | 13 November 2017 Paper

Paper

Characterization of 1-on-1 damage in high reflectors using the spatially-temporally resolved optical laser-induced damage (STEREO-LID) technique

Yejia Xu, Luke Emmert, Travis Day, Carmen Menoni, Wolfgang Rudolph

Proceedings Volume 10447, 104471F (2017) https://doi.org/10.1117/12.2280846

KEYWORDS: Mirrors, Reflectors, Laser induced damage, Reflection, Laser optics, Light scattering, Laser damage threshold, Plasma, Signal detection

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Proceedings Article | 5 July 2017 Paper

Paper

Progress in high repetition rate soft x-ray laser development and pump lasers at Colorado State University

Brendan Reagan, Yong Wang, C. Kyaw, Hanchen Wang, Mario Marconi, Carmen Menoni, Jorge Rocca, Cory Baumgarten, Shoujun Wang, Michael Pedicone, Mark Berrill, Vyacheslav Shlyaptsev, Liang Yin

Proceedings Volume 10243, 102430F (2017) https://doi.org/10.1117/12.2268990

KEYWORDS: X-ray lasers, Optical amplifiers, Laser applications, Laser development, Pulsed laser operation, Extreme ultraviolet, Picosecond phenomena, Semiconductor lasers, Disk lasers, Cryogenics

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Proceedings Article | 16 June 2017 Presentation + Paper

Presentation + Paper

Soft x-ray ablation mass spectrometry: high sensitivity elemental trace analysis

T. Green, W. Chao, A. Duffin, J. Rocca, C. Menoni, I. Kuznetsov

Proceedings Volume 10243, 102430G (2017) https://doi.org/10.1117/12.2267159

KEYWORDS: Laser ablation, Ions, Oxides, Zone plates, Scandium, Nickel, Argon, Glasses, X-ray lasers, Mass spectrometry

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Proceedings Article | 17 February 2017 Presentation + Paper

Presentation + Paper

Demonstration of a 1 Joule, 500 W average power picosecond laser

Brendan Reagan, Cory Baumgarten, Michael Pedicone, Herman Bravo, Liang Yin, Hanchen Wang, Carmen Menoni, Jorge Rocca

Proceedings Volume 10082, 1008219 (2017) https://doi.org/10.1117/12.2254225

KEYWORDS: Picosecond phenomena, Optical amplifiers, Ultrafast phenomena, X-ray lasers, Disk lasers, Extreme ultraviolet, Pulsed laser operation, Laser systems engineering, Amplifiers, Laser applications, Plasma

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Proceedings Article | 6 December 2016 Paper

Paper

Impacts of SiO2 planarization on optical thin film properties and laser damage resistance

T. Day, H. Wang, B. Reagan, J. Rocca, C. Menoni, C. Stolz, P. Mirkarimi, J. Folta, J. Roehling, A. Markosyan, R. Route, M. Fejer, E. Jankowska

Proceedings Volume 10014, 1001422 (2016) https://doi.org/10.1117/12.2245058

KEYWORDS: Dielectrophoresis, Silica, Laser induced damage, Thin films, Etching, Hybrid fiber optics, Absorption, Argon, Molybdenum, Ions

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SPIE Journal Paper | 12 October 2016

Comparison of defects responsible for nanosecond laser-induced damage and ablation in common high index optical coatings

Yejia Xu, Mohammed Abdulameer, Luke Emmert, Travis Day, Dinesh Patel, Carmen Menoni, Wolfgang Rudolph

OE, Vol. 56, Issue 01, 011019, (October 2016) https://doi.org/10.1117/12.10.1117/1.OE.56.1.011019

KEYWORDS: Laser optics, Laser induced damage, Optical coatings, Laser ablation, Hybrid fiber optics, Laser damage threshold, Absorption, Tantalum, Optical engineering, Microscopes

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Proceedings Article | 9 March 2016 Paper

Paper

Development of a kilowatt-class, joule-level ultrafast laser for driving compact high average power coherent EUV/soft x-ray sources

Cory Baumgarten, Michael Pedicone, Herman Bravo, Liang Yin, Brendan Reagan, Mark Woolston, Hanchen Wang, Carmen Menoni, Jorge Rocca

Proceedings Volume 9740, 97400R (2016) https://doi.org/10.1117/12.2212790

KEYWORDS: Pulsed laser operation, Ultrafast lasers, Extreme ultraviolet, Cryogenics, Optical amplifiers, X-ray lasers, Laser energy, Semiconductor lasers, Laser systems engineering, Laser optics, Picosecond phenomena, Plasma, Fiber amplifiers

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Proceedings Article | 23 November 2015 Paper

Paper

Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

Amir Khabbazi, Travis Day, Luke Emmert, Yejia Xu, Andrew Brown, Joseph Talghader, Ella Field, Damon Kletecka, John Bellum, Dinesh Patel, Carmen Menoni, Wolfgang Rudolph

Proceedings Volume 9632, 963215 (2015) https://doi.org/10.1117/12.2196548

KEYWORDS: Laser induced damage, Laser optics, Optical coatings, Probability theory, Atomic layer deposition, Dielectrics, Laser damage threshold, Coating, Ion beams, Sputter deposition, Deposition processes, Electron beams

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Proceedings Article | 23 November 2015 Paper

Paper

Optical coatings excited by femtosecond lasers near the damage threshold: challenges and opportunities

Farzin Beygi Azar Aghbolagh, Stefan Günster, Detlev Ristau, Dinesh Patel, Carmen Menoni, Luke Emmert, Cristina Rodriguez, Zhanliang Sun, Wolfgang Rudolph

Proceedings Volume 9632, 96320K (2015) https://doi.org/10.1117/12.2196553

KEYWORDS: Optical coatings, Femtosecond phenomena, Laser induced damage, Dielectrics, Third-harmonic generation, Dielectric filters, Laser damage threshold, Ultrafast phenomena, Mirrors, Polarizers, Coating, Absorption, Pulsed laser operation, Picosecond phenomena

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Proceedings Article | 23 September 2015 Paper

Paper

Depth determination of critical fluence-limiting defects within planarized and non-planarized mirror coatings

Justin Wolfe, Paul Mirkarimi, John Adams, Nick Teslich, Carmen Menoni, Rajesh Raman, Norm Neilsen, Mary Norton, Ronald Luthi, Christopher Stolz, James Folta, Marlon Menor, Dinesh Patel

Proceedings Volume 9627, 96271C (2015) https://doi.org/10.1117/12.2197349

KEYWORDS: Silica, Mirrors, Laser induced damage, Thin film coatings, Etching, Optical coatings, Resistance, Multilayers, Scanning electron microscopy, Thin films

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Proceedings Article | 22 September 2015 Paper

Paper

Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging

Ilya Kuznetsov, Jorge Filevich, M. Woolston, D. Carlton, W. Chao, E. Anderson, Elliot Bernstein, Dean Crick, Tomas Burian, Libor Juha, Jorge Rocca, Carmen Menoni, Regina Soufli

Proceedings Volume 9589, 958905 (2015) https://doi.org/10.1117/12.2188645

KEYWORDS: Laser ablation, Ions, Mass spectrometry, Magnesium, Corrosion, Crystals, X-ray lasers, Laser induced fluorescence, Molecules, Oxides

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Proceedings Article | 7 January 2015 Paper

Paper

Multi-layer surface profiling using gated wavefront sensing

Xin Wang, Nur Dalilla Nordin, Eddy Chow Mun Tik, ChingSeong Tan, Kuew Wai Chew, Carmen Menoni

Proceedings Volume 9442, 94421K (2015) https://doi.org/10.1117/12.2176174

KEYWORDS: Wavefront sensors, Wavefronts, Cameras, Profiling, Reconstruction algorithms, Inspection, Semiconducting wafers, Sensing systems, Collimators, Prisms

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Proceedings Article | 2 December 2014 Paper

Paper

Modification of multilayer mirror top-layer design for increased laser damage resistance

D. Schiltz, D. Patel, L. Emmert, C. Baumgarten, B. Reagan, W. Rudolph, J. Rocca, C. Menoni

Proceedings Volume 9237, 92371G (2014) https://doi.org/10.1117/12.2068244

KEYWORDS: Coating, Silica, Laser induced damage, Multilayers, Absorption, Resistance, Laser damage threshold, Reflectors, Mirrors, Interfaces

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Proceedings Article | 7 March 2014 Paper

Paper

Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography

W. Chao, E. Anderson, M. Marconi, W. Li, D. Patel, C. Menoni, A. Stein

Proceedings Volume 8973, 89730D (2014) https://doi.org/10.1117/12.2041688

KEYWORDS: Photomasks, Lithography, Nanostructures, Nanolithography, Extreme ultraviolet lithography, Extreme ultraviolet, Imaging systems, Nanoimprint lithography, Photoresist materials, X-ray optics

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Proceedings Article | 3 December 2013 Paper

Paper

Defect insensitive 100 J/cm2 multilayer mirror coating process

Christopher Stolz, Justin Wolfe, Paul Mirkarimi, James Folta, John Adams, Marlon Menor, Nick Teslich, Regina Soufli, Carmen Menoni, Dinesh Patel

Proceedings Volume 8885, 888502 (2013) https://doi.org/10.1117/12.2030477

KEYWORDS: Etching, Silica, Multilayers, Coating, Mirrors, Resistance, Laser induced damage, Ion beams, Visualization, Sputter deposition

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Proceedings Article | 19 November 2013 Paper

Paper

Improvements in the laser damage behavior of Ta2O5/SiO2 interference coatings by modification of the top layer design

D. Patel, D. Schiltz, P. Langton, L. Emmert, L. Acquaroli, C. Baumgarten, B. Reagan, J. Rocca, W. Rudolph, A. Markosyan, R. Route, M. Fejer, C. Menoni

Proceedings Volume 8885, 888522 (2013) https://doi.org/10.1117/12.2030380

KEYWORDS: Laser induced damage, Reflectors, Silica, Scattering, Multilayers, Picosecond phenomena, Absorption, Surface roughness, Ion beams, Sputter deposition

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Proceedings Article | 14 November 2013 Paper

Paper

Predictive growth model of LID: light intensification model

D. Patel, X. Wang, D. Schlitz, P. S. Dehkordi, C. Menoni, E. Chong, ChingSeong Tan

Proceedings Volume 8885, 88850A (2013) https://doi.org/10.1117/12.2030291

KEYWORDS: Laser induced damage, Absorption, Backscatter, Light scattering, Ionization, Chemical species, Scattering, Crystals, Monte Carlo methods, Convolution

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Proceedings Article | 14 November 2013 Paper

Paper

Laser damage in dielectric films: What we know and what we don't

Luke Emmert, Wolfgang Rudolph, Carmen Menoni, Dinesh Patel, Zhanliang Sun

Proceedings Volume 8885, 888516 (2013) https://doi.org/10.1117/12.2030894

KEYWORDS: Absorption, Laser induced damage, Electrons, Thin films, Continuous wave operation, Microscopy, Scattering, Optical coatings, Silica, Ionization

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Proceedings Article | 14 November 2013 Paper

Paper

Confocal photothermal microscopy of thin films based on etalon and thermal lensing effects

Z. Sun, X. Zhang, D. Patel, C. Menoni, W. Rudolph, L. Emmert, A. Mansoori

Proceedings Volume 8885, 88851Y (2013) https://doi.org/10.1117/12.2029955

KEYWORDS: Absorption, Microscopes, Confocal microscopy, Fabry–Perot interferometers, Laser beam diagnostics, Thermal effects, Reflectivity, Signal detection, Thin films, Signal to noise ratio

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Proceedings Article | 30 September 2013 Paper

Paper

Analysis of spatial resolution and coherence demands in soft x-ray image-plane holographic microscopy with two zone plates

David Carlton, Jaroslav Nejdl, Isela Howlett, Carmen Menoni, Jorge Rocca, Mario Marconi, Erik Anderson, Weilun Chao

Proceedings Volume 8849, 88490X (2013) https://doi.org/10.1117/12.2024274

KEYWORDS: Zone plates, Holograms, Diffraction, Holography, X-rays, Microscopy, Sensors, Spatial resolution, X-ray microscopy, Digital holography

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Proceedings Article | 27 September 2013 Paper

Paper

Composition depth profiling by soft x-ray laser-ablation mass spectrometry

Jorge Filevich, M. Woolston, Ilya Kuznetsov, D. Carlton, W. Chao, E. Anderson, Elliot Bernstein, Dean Crick, Jorge Rocca, Carmen Menoni

Proceedings Volume 8849, 88490G (2013) https://doi.org/10.1117/12.2024535

KEYWORDS: Mass spectrometry, Laser ablation, Profiling, X-ray lasers, Multilayers, Ions, Tin, Aluminum, Metals, Gold

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Proceedings Article | 27 September 2013 Paper

Paper

Coherent nanopatterning with table-top soft x-ray lasers

V. Martinez Esquiroz, D. Patel, W. Chao, E. Anderson, M. Marconi, L. Urbanski, W. Li, A. Stein, C. Menoni, J. Rocca

Proceedings Volume 8849, 88490W (2013) https://doi.org/10.1117/12.2024472

KEYWORDS: Photomasks, Lithography, Nanolithography, Nanostructures, X-ray lasers, Photoresist materials, Extreme ultraviolet, Coherence imaging, Printing, Imaging systems

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Proceedings Article | 27 September 2013 Paper

Paper

High-average-power 100-Hz repetition rate table-top soft x-ray lasers

Jorge Rocca, Brendan Reagan, Keith Wernsing, Yong Wang, Liang Yin, Shoujun Wang, Mark Berrill, Mark Woolston, Alden Curtis, Federico J. Furch, Vyacheslav Shlyaptsev, Brad Luther, Dinesh Patel, Mario Marconi, Carmen Menoni

Proceedings Volume 8849, 88490N (2013) https://doi.org/10.1117/12.2024251

KEYWORDS: X-ray lasers, Pulsed laser operation, Plasma, Optical amplifiers, Semiconductor lasers, Molybdenum, Laser applications, Laser development, Picosecond phenomena, Laser energy

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Proceedings Article | 9 July 2013 Paper

Paper

Femtosecond to nanosecond laser damage in dielectric materials

W. Rudolph, C. Rodriguez, Z. Sun, X. Zhang, C. Menoni, P. Langston, E. Krous, D. Patel, L. Emmert, Y. Xu

Proceedings Volume 8786, 878602 (2013) https://doi.org/10.1117/12.2020356

KEYWORDS: Absorption, Dielectrics, Femtosecond phenomena, Laser induced damage, Microscopy, Scattering, Annealing, Particles, Thin films, Reflection

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Proceedings Article | 4 December 2012 Paper

Paper

Ion beam sputtered Y2O3

L. Imbler, D. Patel, C. Menoni, L. Emmert, R. Route, W. Rudolph, A. Markosyan, P. Langston, M. Fejer

Proceedings Volume 8530, 85300Z (2012) https://doi.org/10.1117/12.976808

KEYWORDS: Ion beams, Absorption, Laser induced damage, Sputter deposition, Argon, Surface roughness, Oxygen, Silica, Optical coatings, Optical properties

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Proceedings Article | 4 December 2012 Paper

Paper

What role do defects play in the laser damage behavior of metal oxides?

Y. Xu, Z. Sun, L. Emmert, W. Rudolph, C. Menoni, M. Fejer, R. Route, B. Reagan, J. Rocca, A. Markosyan, P. Langston, D. Patel, K. Wernsing, E. Krous

Proceedings Volume 8530, 85300J (2012) https://doi.org/10.1117/12.981732

KEYWORDS: Oxygen, Absorption, Laser induced damage, Picosecond phenomena, Metals, Oxides, Thin films, Sputter deposition, Ion beams, Silica

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SPIE Journal Paper | 9 July 2012

Third harmonic microscopy of intrinsic and induced material anisotropy in dielectric thin films

Reed Weber, Cristina Rodriguez, Duy Nguyen, Luke Emmert, Wolfgang Rudolph, Dinesh Patel, Carmen Menoni

OE, Vol. 51, Issue 12, 121807, (July 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.12.121807

KEYWORDS: Anisotropy, Microscopy, Thin films, Nanoparticles, Silica, Gold, Polarization, Signal to noise ratio, Dielectrics, Polarized microscopy

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Proceedings Article | 6 December 2011 Paper

Paper

Spontaneous and induced absorption in amorphous Ta2O5 dielectric thin films

A. Markosyan, M. Fejer, R. Route, D. Patel, C. Menoni

Proceedings Volume 8190, 81900F (2011) https://doi.org/10.1117/12.899217

KEYWORDS: Absorption, Thin films, Optical coatings, Dielectrics, Oxides, Ultraviolet radiation, Thin film coatings, Radiation effects, Signal detection, Mid-IR

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Proceedings Article | 23 November 2011 Paper

Paper

Third harmonic microscopy for optical material characterization

R. Weber, D. Nguyen, C. Rodriguez, L. Emmert, C. Menoni, W. Rudolph, D. Patel

Proceedings Volume 8190, 81900V (2011) https://doi.org/10.1117/12.899265

KEYWORDS: Anisotropy, Microscopy, Silica, Nanoparticles, Interfaces, Gold, Optical materials characterization, Optical microscopy, Polarization, Laser induced damage

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Proceedings Article | 6 October 2011 Paper

Paper

Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes

Jorge Rocca, Diana Peterson, Carmen Menoni, Yanwei Liu, Anne Sakdinawat, Fernando Brizuela, David Attwood, Sergio Carbajo, Isela Howlett, Mario Marconi

Proceedings Volume 8140, 81400W (2011) https://doi.org/10.1117/12.892927

KEYWORDS: Microscopes, X-rays, Imaging systems, Spatial resolution, X-ray lasers, Diffraction gratings, Image resolution, Modulation transfer functions, Diffraction, Gas lasers

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Proceedings Article | 5 October 2011 Paper

Paper

Table top nanopatterning by de-magnified Talbot effect using a capillary discharge soft x-ray laser

L. Urbanski, P. Wachulak, A. Isoyan, C. Menoni, J. Rocca, M. Marconi

Proceedings Volume 8140, 81400T (2011) https://doi.org/10.1117/12.892855

KEYWORDS: Photomasks, Mirrors, Spherical lenses, Capillaries, X-ray lasers, Photoresist materials, Extreme ultraviolet, Nanostructures, Photography, Diffraction

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Proceedings Article | 15 December 2010 Paper

Paper

Nanometer scale imaging with table top extreme ultraviolet sources

Mario Marconi, Henryk Fiedorowicz, Przemyslaw Wachulak, Richard Sandberg, Lukasz Urbanski, Jorge Rocca, Artak Isoyan, Carmen Menoni, Andrzej Bartnik, Randy Bartels

Proceedings Volume 7746, 774609 (2010) https://doi.org/10.1117/12.880340

KEYWORDS: Extreme ultraviolet, Holograms, Spatial resolution, Diffraction, Image resolution, Holography, 3D image reconstruction, Photoresist materials, Photomasks, Microscopes

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Proceedings Article | 6 December 2010 Paper

Paper

Advances in ion beam sputtered Sc2O3 for optical interference coatings

Jonathan Tollerud, Roger Route, Erik Krous, Wolfgang Rudolph, Ashot Markosyan, Martin Fejer, Carmen Menoni, Peter Langston, Duy Nguyen, Dinesh Patel, Luke Emmert

Proceedings Volume 7842, 784202 (2010) https://doi.org/10.1117/12.855604

KEYWORDS: Laser induced damage, Ion beams, Sputter deposition, Oxygen, Scandium, Picosecond phenomena, Refractive index, Atomic force microscopy, Argon, Optical coatings

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Proceedings Article | 2 December 2010 Paper

Paper

The vacuum effect of femtosecond LIDT measurements on dielectric films

D. Nguyen, D. Patel, C. Menoni, W. Rudolph, L. Emmert

Proceedings Volume 7842, 78420V (2010) https://doi.org/10.1117/12.867996

KEYWORDS: Oxygen, Silica, Dielectrics, Femtosecond phenomena, Atomic layer deposition, Atmospheric optics, Nitrogen, Laser damage threshold, Ionization, Electrons

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Proceedings Article | 29 November 2010 Paper

Paper

Femtosecond pulse S on 1 LIDT in dielectric materials: comparison of experiment and theory

W. Rudolph, C. Menoni, M. Mero, L. Emmert, D. Patel, D. Nguyen, E. Krous

Proceedings Volume 7842, 784211 (2010) https://doi.org/10.1117/12.868035

KEYWORDS: Ionization, Dielectrics, Laser damage threshold, Pulsed laser operation, Picosecond phenomena, Femtosecond phenomena, Absorption, Dielectric breakdown, Laser induced damage, Oxides

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Proceedings Article | 31 December 2009 Paper

Paper

The effect of nitrogen doping on the multiple-pulse subpicosecond dielectric breakdown of hafnia films

D. Patel, W. Rudolph, D. Nguyen, C. Menoni, L. Emmert, E. Krous

Proceedings Volume 7504, 750402 (2009) https://doi.org/10.1117/12.836504

KEYWORDS: Nitrogen, Laser damage threshold, Oxides, Hafnium, Doping, Electrons, Dielectric breakdown, Oxygen, Ions, Ionization

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Proceedings Article | 31 December 2009 Paper

Paper

Fundamental processes controlling the single and multiple femtosecond pulse damage behavior of dielectric oxide films

D. Nguyen, D. Patel, K. Starke, D. Ristau, E. Krous, C. Menoni, W. Rudolph, M. Mero, L. Emmert, M. Jupé

Proceedings Volume 7504, 75040P (2009) https://doi.org/10.1117/12.836508

KEYWORDS: Electrons, Ionization, Laser damage threshold, Oxides, Dielectrics, Laser induced damage, Absorption, Femtosecond phenomena, Pulsed laser operation, Picosecond phenomena

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Proceedings Article | 31 December 2009 Paper

Paper

Optimization of scandia thin films for high power laser coating applications

Dinesh Patel, Luke Emmert, Carmen Menoni, Martin Fejer, Peter Langston, Roger Route, Duy Nguyen, Erik Krous, Ashot Markosyan, Wolfgang Rudolph, Michelle Shinn

Proceedings Volume 7504, 750407 (2009) https://doi.org/10.1117/12.836915

KEYWORDS: Laser damage threshold, Oxygen, Coating, Ion beams, Refractive index, Absorption, Thin films, Sputter deposition, Thin film coatings, High power lasers

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Proceedings Article | 31 December 2009 Paper

Paper

Studies of femtosecond laser induced damage of HfO2 thin film in atmospheric and vacuum environments

W. Rudolph, E. Krous, C. Menoni, D. Patel, D. Nguyen, L. Emmert, M. Shinn

Proceedings Volume 7504, 750403 (2009) https://doi.org/10.1117/12.836505

KEYWORDS: Silica, Nitrogen, Femtosecond phenomena, Thin films, Laser damage threshold, Ionization, Free electron lasers, Dielectrics, Coating, Atmospheric optics

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Proceedings Article | 29 September 2009 Paper

Paper

Progress in the development of compact high-repetition-rate soft x-ray lasers: gain saturation at 10.9 nm and first demonstration of an all-diode-pumped soft x-ray laser

F. Furch, B. Reagan, V. Shlyaptsev, M. Berrill, B. Luther, J. Rocca, S. Domingue, M. Marconi, D. Alessi, Y. Wang, F. Pedaci, C. Menoni, D. Kemp, D. Martz

Proceedings Volume 7451, 745106 (2009) https://doi.org/10.1117/12.826349

KEYWORDS: X-ray lasers, Optical amplifiers, Plasma, Picosecond phenomena, Tellurium, Semiconductor lasers, Pulsed laser operation, Cameras, Molybdenum, Solids

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Proceedings Article | 29 September 2009 Paper

Paper

Tabletop soft x-ray lithography

L. Urbanski, P. Wachulak, C. Menoni, M. Marconi, Artak Isoyan, Fan Jiang, F. Cerrina, J. Rocca, Yang Chun Cheng

Proceedings Volume 7451, 74510J (2009) https://doi.org/10.1117/12.825509

KEYWORDS: Capillaries, Holography, Lithography, Photoresist materials, Printing, Nanostructures, Photomasks, Interferometry, X-ray lithography, Coherence imaging

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Proceedings Article | 29 September 2009 Paper

Paper

Advances in full field microscopy with table-top soft x-ray lasers

Yanwei Liu, David Attwood, Yuri Pershyn, Mario Marconi, Przemeslaw Wachulak, Weilun Chao, Carmen Menoni, Jorge Rocca, Viktor Kondratenko, Yong Wang, Courtney Brewer, Kenneth Goldberg, Alexander Vinogradov, Igor Artyukov, Erik Anderson, Francesco Pedaci, Bradley Luther, Fernando Brizuela

Proceedings Volume 7451, 74510I (2009) https://doi.org/10.1117/12.826419

KEYWORDS: Microscopes, Zone plates, Extreme ultraviolet lithography, Objectives, Photomasks, Spatial resolution, X-ray lasers, Microscopy, Modulation, Modulation transfer functions

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Proceedings Article | 7 May 2009 Paper

Paper

Sub-50nm extreme ultraviolet holographic imaging

C. Menoni, J. Rocca, R. Bartels, P. Wachulak, M. Marconi

Proceedings Volume 7358, 735806 (2009) https://doi.org/10.1117/12.819795

KEYWORDS: Extreme ultraviolet, Holograms, Image resolution, Holography, Spatial resolution, Photoresist materials, Silicon, Image filtering, Binary data, Scanning electron microscopy

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Imaging tools for nanoscicence involving sub-100-nm scale objects have been dominated by atomic force microscopy (AFM), scanning tunneling microscopy (STM), and electron microscopy (SEM, TEM). These imaging techniques have contributed substantially to the development of nanoscience, providing a very powerful diagnostic tool capable of obtaining images with atomic resolution or as a subsidiary mechanism to arrange or modify surfaces also at the atomic scale [1,2]. However, some important problems have persisted traditional nanoscale imaging techniques. For example when scanning a nanometer size object that is not attached rigidly to a surface the interaction with the tip significantly perturbs the specimen degrading or eventually precluding the image acquisition. Electron microscopy often requires surface preparation, consisting of metallization of the sample to avoid surface charging. Additionally the metallization of the sample may alter its characteristics and also limits the resolution. In both cases, if the sample is large (millimeters in size) due to the limited field of view, the image obtained with these conventional methods is only representative of a very small portion of the object. Wavelength-limited holographic imaging using carbon nanotubes as the test object with a table-top extreme ultraviolet (EUV) laser operating at 46.9 nm will be discussed. The resolution achieved in this imaging is evaluated with a rigorous correlation image analysis and confirmed with the conventional knife-edge test. The nano-holography presented requires no optics or critical beam alignment; thus the hologram recording scheme is very simple and does not need special sample preparation. In holography, image contrast requires absorption to provide scattering by the illuminating beam. The EUV laser wavelength employed in this experiment (46.9nm) is advantageous because carbon based materials typically exhibit very small attenuation lengths, around 25 nm. The high absorption of even small object volumes produces high optical contrasts. The short attenuation length thus enables nearly full contrast for most objects without applying forces to the imaged objects, no charge buildup, and without the need for complicated sample preparation. Additionally this simple technique allows to image macroscopic size objects, several millimeters square with arbitrary shape while simultaneously sustaining across the image sub-50 nm spatial resolution. This characteristic is equivalent to storing data at a density rate of ~0.3 Tbit per square inch over large areas, and represents a simple demonstration of a method that allows permanently dense storage of a large amount of data.

SPIE Journal Paper | 1 April 2009

New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers

Przemyslaw Wachulak, Lukasz Urbanski, Maria Capeluto, D. Hill, Willie Rockward, Claudio Iemmi, Erik Anderson, Carmen Menoni, Jorge Rocca, Mario Marconi

JM3, Vol. 8, Issue 02, 021206, (April 2009) https://doi.org/10.1117/12.10.1117/1.3129837

KEYWORDS: Extreme ultraviolet, Interferometry, Lithography, Interferometers, Mirrors, Diffraction gratings, Wavefronts, Extreme ultraviolet lithography, Capillaries, Synchrotrons

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Proceedings Article | 18 March 2009 Paper

Paper

Extreme ultraviolet holographic lithography with a table-top laser

A. Isoyan, J. Rocca, L. Urbanski, F. Cerrina, Y.-C. Cheng, M. Marconi, P. Wachulak, F. Jiang, C. Menoni

Proceedings Volume 7271, 72713O (2009) https://doi.org/10.1117/12.814678

KEYWORDS: Computer generated holography, Extreme ultraviolet, Lithography, Photomasks, Holography, Photoresist materials, Extreme ultraviolet lithography, 3D image reconstruction, Image resolution, Nanolithography

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Proceedings Article | 18 March 2009 Paper

Paper

Inspection 13.2-nm table-top full-field microscope

J. Rocca, M. Marconi, P. Naulleau, P. Wachulak, E. Anderson, F. Brizuela, W. Chao, C. Brewer, Y. Wang, K. Goldberg, C. Menoni, D. Attwood, F. Pedaci, Y. Liu

Proceedings Volume 7271, 72713F (2009) https://doi.org/10.1117/12.814320

KEYWORDS: Microscopes, Spatial resolution, Extreme ultraviolet lithography, Zone plates, Photomasks, Extreme ultraviolet, Image resolution, Inspection, Objectives, Modulation transfer functions

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Proceedings Article | 30 December 2008 Paper

Paper

Electron spin resonance spectroscopy investigation of ion beam sputtered HfO2 and SiO2 thin films

D. Patel, Michelle Shinn, E. Krous, P. Langston, C. Menoni, B. Langdon

Proceedings Volume 7132, 71320M (2008) https://doi.org/10.1117/12.804459

KEYWORDS: Silica, Annealing, Ion beams, Thin films, Spectroscopy, Oxygen, Hafnium, Spectrometers, Signal detection, Hybrid fiber optics

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Proceedings Article | 30 December 2008 Paper

Paper

SiO2/HfO2 multilayers: impact of process parameters and stack geometry on the optical and structural properties

A. Markosyan, D. Patel, B. Langdon, E. Krous, C. Menoni, P. Langston, B. Reagan, J. Rocca, R. Route, M. Fejer, F. Furch

Proceedings Volume 7132, 71320L (2008) https://doi.org/10.1117/12.804434

KEYWORDS: Multilayers, Absorption, Laser induced damage, Optical coatings, Ions, Silica, Argon, Surface roughness, Ion beams, Chemical species

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Proceedings Article | 30 December 2008 Paper

Paper

The effect of annealing on the subpicosecond breakdown behavior of hafnia films

Wolfgang Rudolph, Mark Mero, Carmen Menoni, Eric Krous, Duy Nguyen, Dinesh Patel, Luke Emmert

Proceedings Volume 7132, 71320N (2008) https://doi.org/10.1117/12.804452

KEYWORDS: Annealing, Laser damage threshold, Absorption, Picosecond phenomena, Laser induced damage, Silica, Dielectrics, Optical coatings, High power lasers, Femtosecond phenomena

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Proceedings Article | 16 January 2008 Paper

Paper

Influence of process conditions on the optical properties of HfO2/SiO2 coatings for high-power laser coatings

Peter Langston, B. Langdon, J. Rocca, Albert Ogloza, D. Patel, C. Menoni, E. Krous, S. Kholi, F. Tomasel, P. McCurdy

Proceedings Volume 6720, 67200X (2008) https://doi.org/10.1117/12.753027

KEYWORDS: Hybrid fiber optics, Surface roughness, Crystals, Argon, Optical coatings, Atomic force microscopy, Ion beams, Sputter deposition, Ions, High power lasers

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Proceedings Article | 12 October 2007 Paper

Paper

Structural transformations in Sc/Si multilayers irradiated by EUV lasers

Yuriy Uspenskiy, Evgeniy Zubarev, Victoriya Sevryukova, Georgiy Vaschenko, Alexander Vinogradov, Michael Grisham, Valeriy Kondratenko, Yuriy Pershyn, Dmitriy Voronov, Jorge Rocca, Igor Artioukov, Carmen Menoni

Proceedings Volume 6702, 67020U (2007) https://doi.org/10.1117/12.732705

KEYWORDS: Silicon, Extreme ultraviolet, Multilayers, Transmission electron microscopy, Laser ablation, Crystals, Laser irradiation, Laser damage threshold, Pulsed laser operation, Amorphous silicon

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Proceedings Article | 12 October 2007 Paper

Paper

High spatial resolution full-field microscopy using a desktop-size soft x-ray laser

Yuriy Pershyn, Carmen Menoni, Courtney Brewer, Valeriy Kondratenko, Jorge Rocca, Erik Anderson, Igor Artioukov, Fernando Brizuela, David Attwood, Georgiy Vaschenko, Weilun Chao, Dale Martz, Alexander Vinogradov, Mario Marconi

Proceedings Volume 6702, 67020M (2007) https://doi.org/10.1117/12.733422

KEYWORDS: Microscopes, Zone plates, Spatial resolution, X-ray lasers, Microscopy, Image processing, Capillaries, Charge-coupled devices, Objectives, Silicon

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Proceedings Article | 12 October 2007 Paper

Paper

Nanoscale ablation with soft x-ray lasers

Georgiy Vaschenko, Jorge Rocca, Erik Anderson, David Attwood, Benjamin Langdon, Weilun Chao, Herman Bravo, Oscar Hemberg, Scott Bloom, Mark Berrill, Carmen Menoni, Fernando Brizuela

Proceedings Volume 6702, 67020L (2007) https://doi.org/10.1117/12.733401

KEYWORDS: Laser ablation, X-ray lasers, Zone plates, Polymethylmethacrylate, Diffraction, Signal attenuation, Silver, Laser induced breakdown spectroscopy, Spectroscopy, Atomic force microscopy

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Proceedings Article | 11 October 2007 Paper

Paper

Tabletop soft x-ray holography with sub-200-nm spatial resolution

P. Wachulak, M. Marconi, J. Rocca, R. Bartels, C. Menoni

Proceedings Volume 6702, 67020J (2007) https://doi.org/10.1117/12.732904

KEYWORDS: Holograms, Spatial resolution, Wavelets, 3D image reconstruction, Image resolution, Holography, Photoresist materials, X-rays, Extreme ultraviolet, Atomic force microscope

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Proceedings Article | 11 October 2007 Paper

Paper

Interferometric lithography with sub-100-nm resolution using a tabletop 46.9-nm laser

C. Menoni, M. Marconi, M. Capeluto, D. Patel, J. Rocca, P. Wachulak

Proceedings Volume 6702, 67020I (2007) https://doi.org/10.1117/12.732900

KEYWORDS: Photoresist materials, Mirrors, Interferometry, Polymethylmethacrylate, Lithography, Laser applications, Nanostructures, Extreme ultraviolet, Capillaries, Photoresist developing

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Proceedings Article | 8 October 2007 Paper

Paper

High-brightness tabletop soft X-ray lasers at high repetition rate: injection-seeding of solid target plasma amplifiers and other developments

E. Granados, D. Alessi, D. Patel, V. Shlyaptsev, B. Luther, M. Berrill, J. Rocca, Y. Wang, F. Pedacci, D. Martz, C. Menoni, M. Larotonda

Proceedings Volume 6702, 670202 (2007) https://doi.org/10.1117/12.734285

KEYWORDS: Amplifiers, X-ray lasers, Plasma, Solids, Optical amplifiers, Silver, Pulsed laser operation, Laser applications, Picosecond phenomena, Spatial coherence

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Proceedings Article | 15 January 2007 Paper

Paper

Assessing the impact of atomic oxygen in the damage threshold and stress of Hafnia films grown by ion beam sputter deposition

D. Patel, F. Tomasel, C. Menoni, J. Rocca, Y. Wang, J. Lovewell, E. Krous, P. McCurdy, S. Kholi, K. Hsiao, M. Larotonda, J. Jensen

Proceedings Volume 6403, 640314 (2007) https://doi.org/10.1117/12.696080

KEYWORDS: Hybrid fiber optics, Oxygen, Ion beams, Laser damage threshold, Sputter deposition, Plasma, Picosecond phenomena, Optical coatings, Laser induced damage, X-ray diffraction

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Proceedings Article | 23 March 2006 Paper

Paper

EUV imaging with a 13nm tabletop laser reaches sub-38 nm spatial resolution

Yanwei Liu, Fernando Brizuela, Bradley Luther, David Attwood, Miguel Larotonda, Weilun Chao, Carmen Menoni, Georgiy Vaschenko, Yong Wang, Courtney Brewer, Mario Marconi, Jorge Rocca, Erik Anderson

Proceedings Volume 6151, 61510X (2006) https://doi.org/10.1117/12.656588

KEYWORDS: Extreme ultraviolet, Zone plates, Spatial resolution, Microscopes, Photomasks, Imaging systems, Extreme ultraviolet lithography, Inspection, Plasma, Reflectivity

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Proceedings Article | 14 September 2005 Paper

Paper

Nanometer-scale imaging with compact soft x-ray lasers

Courtney Brewer, J. Alexander Liddle, Hector Mancini, Fernando Brizuela, Yuriy Pershyn, Mario Marconi, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca, David Attwood, Weilun Chao, Michael Grisham, Valeriy Kondratenko, Alexander Vinogradov, Igor Artioukov, Erik Anderson

Proceedings Volume 5919, 59190N (2005) https://doi.org/10.1117/12.614646

KEYWORDS: Zone plates, Image resolution, X-ray lasers, Imaging systems, Capillaries, Microscopes, X-rays, Spatial resolution, Objectives, Modulation

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Proceedings Article | 13 September 2005 Paper

Paper

Demonstration of saturated high repetition rate tabletop soft x-ray lasers at wavelengths down to 13.2 nm

M. Larotonda, C. Menoni, M. Berrill, D. Alessi, Y. Wang, A. Weith, B. Luther, M. Marconi, V. Shlyaptsev, J. Rocca

Proceedings Volume 5919, 591901 (2005) https://doi.org/10.1117/12.621786

KEYWORDS: Plasma, Grazing incidence, Picosecond phenomena, X-ray lasers, Ions, Molybdenum, Cadmium, Tin, Refraction, Tellurium

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SPIE Journal Paper | 1 July 2005

Short-wavelength ablation of molecular solids: pulse duration and wavelength effects

Libor Juha, Michal Bittner, Dagmar Chvostova, Josef Krasa, Michaela Kozlov, Miroslav Pfeifer, Jiri Polan, Ansgar Präg, Bedrich Rus, Michal Stupka, Josef Feldhaus, Vit Letal, Zdenek Otcenasek, Jacek Krzywinski, Robert Nietubye, Jerzy Pelka, Andrzej Andrejczuk, Ryszard Sobierajski, Leszek Ryc, Frederick Boody, Henryk Fiedorowicz, Andrzej Bartnik, Janusz Mikolajczyk, Rafal Rakowski, Pavel Kubát, Ladislav Pína, Martin Horváth, Michael Grisham, Georgiy Vaschenko, Carmen Menoni, Jorge Rocca

JM3, Vol. 4, Issue 03, 033007, (July 2005) https://doi.org/10.1117/12.10.1117/1.2037467

KEYWORDS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Solids, Pulsed laser operation, X-rays, Signal attenuation, Photons, Absorption

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Proceedings Article | 10 May 2005 Paper

Paper

Nano-imaging with compact extreme ultraviolet laser sources

C. Brewer, J. Rocca, D. Attwood, C. Menoni, M. Marconi, A. Vinogradov, M. Grisham, Y. Pershyn, M. Larotonda, G. Vaschenko, J. Liddle, W. Chao, Y. Wang, B. Luther, I. Artioukov, E. Anderson, F. Brizuela, V. Kondratenko

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.601899

KEYWORDS: Zone plates, Extreme ultraviolet, Imaging systems, Image resolution, Microscopes, Laser sources, Silicon, Spatial resolution, Objectives, Reflectivity

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Proceedings Article | 10 November 2004 Paper

Paper

Short-wavelength ablation of solids: pulse duration and wavelength effects

Bedrich Rus, Jorge Rocca, Ladislav Pina, Jiri Polan, Janusz Mikolajczyk, Andrzej Andrejczuk, Josef Feldhaus, Ansgar Prag, Andrzej Bartnik, Leszek Ryc, Jerzy Pelka, Rafal Rakowski, Michaela Kozlova, Michal Stupka, Henryk Fiedorowicz, Zdenek Otcenasek, Georgiy Vaschenko, P. Kubat, Jacek Krzywinski, Michael Grisham, Vit Letal, Josef Krasa, Libor Juha, Dagmar Chvostova, Ryszard Sobierajski, Frederick Boody, Carmen Menoni, Michal Bittner

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.560413

KEYWORDS: Laser ablation, Polymethylmethacrylate, Extreme ultraviolet, Free electron lasers, Pulsed laser operation, Photons, X-rays, Plasma, Signal attenuation, Etching

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Proceedings Article | 10 November 2004 Paper

Paper

Study of irradiation damage of Sc/Si multilayer mirrors with a 46.9-nm tabletop laser

Michael Grisham, Carmen Menoni, Jorge Rocca, Viktoria Sevryukova, Evgeniy Zubarev, Igor Artioukov, Valeriy Kondratenko, Dmitrii Voronov, Georgiy Vaschenko, Alexander Vinogradov, Yuriy Pershin

Proceedings Volume 5534, (2004) https://doi.org/10.1117/12.557952

KEYWORDS: Mirrors, Multilayers, Silicon, Extreme ultraviolet, Laser damage threshold, Extreme ultraviolet lithography, Argon ion lasers, Borosilicate glass, Transmission electron microscopy, X-ray diffraction

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Proceedings Article | 21 October 2004 Paper

Paper

Interferometric lithography at 46.9 nm

Carmen Menoni, M. Capeluto, Michael Grisham, Georgiy Vaschenko, S. Luduena, Jorge Rocca, Mario Marconi, L. Pietrasanta

Proceedings Volume 5622, (2004) https://doi.org/10.1117/12.592201

KEYWORDS: Polymethylmethacrylate, Interferometry, Lithography, Extreme ultraviolet, Diffraction, Mirrors, Semiconducting wafers, Near field diffraction, Laser sources, Plasma

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Proceedings Article | 29 September 2004 Paper

Paper

Investigation of damage threshold of ion beam deposited oxide thin film optics for high-peak-power short-pulse lasers

Sandeep Kohli, Carmen Menoni, Fernando Brizuela, Ann Fitzgerald Dummer, Brad Luther, Miguel Larotonda, Jason George, Jorge Rocca, Pat McCurdy, Charissa Duskis

Proceedings Volume 5527, (2004) https://doi.org/10.1117/12.559903

KEYWORDS: Laser damage threshold, Multilayers, Ion beams, Aluminum, Oxides, Tantalum, Reflectivity, Sputter deposition, Thin films, Laser systems engineering

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Proceedings Article | 20 September 2004 Paper

Paper

Comparing ablation induced by fs, ps, and ns XUV-laser pulses

Bedrich Rus, Jerzy Pelka, Dagmar Chvostova, Ansgar Praeg, Jiri Polan, Michael Grisham, Ryszard Sobierajski, Zdenek Otcenasek, Jacek Krzywinski, Michal Bittner, Josef Krasa, Carmen Menoni, Josef Feldhaus, Vit Letal, Georgiy Vaschenko, Andrzej Andrejczuk, Michal Stupka, Libor Juha, Frederick Boody, Michaela Kozlova, Jorge Rocca

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.547086

KEYWORDS: Laser ablation, Extreme ultraviolet, Free electron lasers, Polymethylmethacrylate, Pulsed laser operation, Mirrors, Picosecond phenomena, Spherical lenses, Absorption, Etching

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Proceedings Article | 19 December 2003 Paper

Paper

Recent results in capillary discharge soft x-ray laser research

Yu. Pershin, V. Kondratenko, Jorge Rocca, Bradley Luther, Georgiy Vaschenko, Vyacheslav Shlyaptsev, Alexander Vinogradov, Libor Juha, Francesco Pedacci, Yong Wang, E. Zubarev, Michael Grisham, D. Voronov, Carmen Menoni, Mario Marconi, Igor Artioukov, Jorge Filevich, V. Sevryukova

Proceedings Volume 5197, (2003) https://doi.org/10.1117/12.510944

KEYWORDS: Capillaries, Plasma, Silicon, Laser ablation, Multilayers, X-ray lasers, Mirrors, Laser damage threshold, Waveguides, Polymethylmethacrylate

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Proceedings Article | 4 December 2002 Paper

Paper

Small signal frequency response of laser diodes using a femtosectond frequency comb

Jon Pikal, G. Vaschenko, Carmen Menoni, Ovidio Anton, Dinesh Patel

Proceedings Volume 4871, (2002) https://doi.org/10.1117/12.460479

KEYWORDS: Modulation, Semiconductor lasers, Optical parametric oscillators, Quantum wells, Femtosecond phenomena, Optical testing, Laser optics, Spectrum analysis, Laser damage threshold, Optical amplifiers

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Proceedings Article | 11 June 2002 Paper

Paper

Improvement in the frequency response of 1.3-um buried heterostructure InAsP lasers

Carmen Menoni, Dinesh Patel, Gary Robinson, Ovidio Anton, Jon Pikal, G. Vaschenko

Proceedings Volume 4643, (2002) https://doi.org/10.1117/12.470420

KEYWORDS: Modulation, Quantum wells, Optical parametric oscillators, Semiconductor lasers, Heterojunctions, Resistors, Laser optics, Femtosecond phenomena, Optical testing, Solids

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Proceedings Article | 8 November 2001 Paper

Paper

Analysis of the modulation response of 1.3-um strained InAsP lasers

Dinesh Patel, Jon Pikal, G. Vaschenko, Carmen Menoni, Gary Robinson, Ovidio Anton

Proceedings Volume 4533, (2001) https://doi.org/10.1117/12.447767

KEYWORDS: Modulation, Quantum wells, Semiconductor lasers, Inductance, Heterojunctions, Resistors, Laser damage threshold, Network security, Laser processing, Signal analysis

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Proceedings Article | 22 June 1999 Paper

Paper

Probing carrier dynamics in ZnCdSe/ZnSe quantum wells with a synchroscan streak camera

Carmen Menoni, Y. Qiu, G. Vaschenko, Henryk Temkin

Proceedings Volume 3516, (1999) https://doi.org/10.1117/12.350443

KEYWORDS: Excitons, Quantum wells, Streak cameras, Carrier dynamics, Luminescence, Time metrology, Quantum efficiency, Picosecond phenomena, Neodymium, Electrical engineering

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Proceedings Article | 22 June 1999 Paper

Paper

Picosecond characterization of low-frequency fluctuations in edge-emitting semiconductor lasers with optical feedback

Salvador Balle, Carmen Menoni, Jorge Rocca, G. Vaschenko, Massimo Giudici, Jorge Tredicce

Proceedings Volume 3516, (1999) https://doi.org/10.1117/12.350442

KEYWORDS: Streak cameras, Picosecond phenomena, Semiconductor lasers, Diodes, Edge emitting semiconductor lasers, Oscilloscopes, Microchannel plates, Image intensifiers, Laser optics, Spectroscopy

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Showing 5 of 96 publications

Proceedings Volume Editor (12)

SPIE Conference Volume | 19 December 2023

Laser-Induced Damage in Optical Materials 2023

SPIE Conference Volume | 14 July 2023

Compact Radiation Sources from EUV to Gamma-rays: Development and Applications

SPIE Conference Volume | 3 January 2023

Laser-Induced Damage in Optical Materials 2022

SPIE Conference Volume | 11 August 2022

Laser-Induced Damage in Optical Materials 2021

SPIE Conference Volume | 11 November 2020

Laser-induced Damage in Optical Materials 2020

Showing 5 of 12 publications

Conference Committee Involvement (24)

Optical Technologies for Inertial Fusion Energy (IFE)

25 January 2025 | San Francisco, California, United States

Laser-Induced Damage in Optical Materials 2024

7 October 2024 | San Ramon, California, United States

Laser-Induced Damage in Optical Materials 2023

18 September 2023 | Dublin/Livermore, California, United States

Compact Radiation Sources from EUV to Gamma-rays: Development and Applications

25 April 2023 | Prague, Czech Republic

Laser-Induced Damage in Optical Materials 2022

18 September 2022 | Rochester, New York, United States

Laser-Induced Damage in Optical Materials 2021

12 October 2021 | Online Only, United States

Laser-induced Damage in Optical Materials 2020

14 September 2020 | Online Only, New York, United States

Laser-induced Damage in Optical Materials 2019

23 September 2019 | Broomfield (Boulder area), Colorado, United States

X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII

12 August 2019 | San Diego, California, United States

Laser-Induced Damage in Optical Materials 2018: 50th Anniversary Conference

24 September 2018 | Boulder, Colorado, United States

Laser-Induced Damage in Optical Materials 2017

24 September 2017 | Boulder, Colorado, United States

X-Ray Lasers and Coherent X-Ray Sources: Development and Applications

24 April 2017 | Prague, Czech Republic

Laser-Induced Damage in Optical Materials 2016

25 September 2016 | Boulder, Colorado, United States

Laser-Induced Damage in Optical Materials: 2015

28 September 2015 | Boulder, Colorado, United States

X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI

12 August 2015 | San Diego, California, United States

Laser-Induced Damage in Optical Materials: 2014

15 September 2014 | Boulder, Colorado, United States

Laser Damage Symposium: XLV Annual Symposium on Optical Materials for High-Power Lasers

22 September 2013 | Boulder, Colorado, United States

X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X

27 August 2013 | San Diego, California, United States

Laser Damage Symposium XLIV: Annual Symposium on Optical Materials for High Power Lasers

23 September 2012 | Boulder, Colorado, United States

Laser Damage Symposium XLIII: Annual Symposium on Optical Materials for High Power Lasers

18 September 2011 | Boulder, Colorado, United States

Laser Damage Symposium XLII: Annual Symposium on Optical Materials for High Power Lasers

26 September 2010 | Boulder, Colorado, United States

Semiconductor Optoelectronic Devices for Lightwave Communication

8 September 2003 | Orlando, Florida, United States

Semiconductor Lasers and Optical Amplifiers for Lightwave Communication Systems

29 July 2002 | Boston, MA, United States

Semiconductor Lasers for Lightwave Communication Systems

21 August 2001 | Denver, CO, United States

Showing 5 of 24 Conference Committees

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