Thin Film Microstructures: Simulation And Theory

A. Mazor; D. J. Srolovitz; P. S. Hagan; B. G. Bukiet

doi:10.1117/12.941845

2 February 1988 Thin Film Microstructures: Simulation And Theory

A. Mazor, D. J. Srolovitz, P. S. Hagan, B. G. Bukiet

Proceedings Volume 0821, Modeling of Optical Thin Films; (1988) https://doi.org/10.1117/12.941845
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

The nature of the microstructure of physical vapor-deposited films depends sensitively on the substrate temperature during deposition. At low temperatures the microstructure is porous and ballistic aggregation-like, at intermediate temperatures the microstructure is columnar, and at elevated temperatures the grains are three dimensional. These different microstructural regimes are known as Zone I, II, and III, respectively. A theoretical analysis is presented in which the temporal evolution of the columnar micro-structure (Zone II) is studied. The columnar microstructure is shown to be a balance between shadowing (which results in Zone I microstructures) and surface diffusion (which tends to smooth the surface). In addition to predicting the proper microstructure, this analysis properly predicts the temperature at which the Zone II to Zone I microstructural transition occurs. Since bulk diffusion is negligible and surface diffusion controls the microstructure in Zone II, the microstructure in the bulk of the film, may be viewed as frozen and all microstructural evolution occurs at the current, or active, surface. A Monte Carlo computer simulation technique which models the microstructural evolution of the surface is presented. The simulation follows the temporal evolution of realistic three dimensional Zone II microstructures and accounts for growth competition between adjacent grains and the formation of film texture.

Citation Download Citation

A. Mazor, D. J. Srolovitz, P. S. Hagan, and B. G. Bukiet "Thin Film Microstructures: Simulation And Theory", Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); https://doi.org/10.1117/12.941845

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available