MEMS deformable mirror actuators with enhanced reliability

S. A. Cornelissen; T. G. Bifano; P. A. Bierden

doi:10.1117/12.910742

15 February 2012 MEMS deformable mirror actuators with enhanced reliability

S. A. Cornelissen, T. G. Bifano, P. A. Bierden

Proceedings Volume 8253, MEMS Adaptive Optics VI; 825306 (2012) https://doi.org/10.1117/12.910742
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage resulting from snap-through.

Citation Download Citation

S. A. Cornelissen, T. G. Bifano, and P. A. Bierden "MEMS deformable mirror actuators with enhanced reliability", Proc. SPIE 8253, MEMS Adaptive Optics VI, 825306 (15 February 2012); https://doi.org/10.1117/12.910742

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