Influence of alignment error and random noise on interferometry flat sub-aperture stitching

Wantao Deng; Kaiwei Wang; Jinchun Zhang

doi:10.1117/12.966324

15 October 2012 Influence of alignment error and random noise on interferometry flat sub-aperture stitching

Wantao Deng, Kaiwei Wang, Jinchun Zhang

Proceedings Volume 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 841715 (2012) https://doi.org/10.1117/12.966324
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

In the flat sub-aperture stitching test, the dominant e error comes from two dimensional translation stage that carries the flat under test, which contains tilt and position error i.e., the alignment error. In order to analyze the influence of alignment error on stitching precision, we use Zemax optical software to simulate a system to detect the phase of each sub-aperture of measured flat and add tilt and position errors and random noise to sub-apertures. The simulation model was utilized in this paper to evaluate the mechanical precision of the translation stage in order to meet a required stitching precision of 1/1000λ.

Citation Download Citation

Wantao Deng, Kaiwei Wang, and Jinchun Zhang "Influence of alignment error and random noise on interferometry flat sub-aperture stitching", Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841715 (15 October 2012); https://doi.org/10.1117/12.966324

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