Temporal modulation of synchrotron x-rays using torsional MEMS mirrors

Donald A. Walko; Il Woong Jung; Daniel Lopez; Deepkishore Mukhopadhyay; Craig P. Schwartz; Gopal K. Shenoy; Jin Wang

doi:10.1117/12.930057

15 October 2012 Temporal modulation of synchrotron x-rays using torsional MEMS mirrors

Donald A. Walko, Il Woong Jung, Daniel Lopez, Deepkishore Mukhopadhyay, Craig P. Schwartz, Gopal K. Shenoy, Jin Wang

Proceedings Volume 8502, Advances in X-Ray/EUV Optics and Components VII; 85020H (2012) https://doi.org/10.1117/12.930057
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

We demonstrate the use of electrostatically driven micro-electromechanical systems (MEMS) devices to control and deliver synchrotron x-ray pulses at high repetition rates. Torsional MEMS micromirrors, rotating at duty cycles of 2 kHz and higher, were used to modulate grazing-incidence x rays, producing x-ray bunches shorter than 10 μs. We find that dynamic deformation of the oscillating micromirror is a limiting factor in the duration of the x-ray pulses produced, and we describe plans for reaching higher operating frequencies using mirrors designed for minimal deformation.

Citation Download Citation

Donald A. Walko, Il Woong Jung, Daniel Lopez, Deepkishore Mukhopadhyay, Craig P. Schwartz, Gopal K. Shenoy, and Jin Wang "Temporal modulation of synchrotron x-rays using torsional MEMS mirrors", Proc. SPIE 8502, Advances in X-Ray/EUV Optics and Components VII, 85020H (15 October 2012); https://doi.org/10.1117/12.930057

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