Process optimized beam profiles for laser micromachining

Christian Bischoff; Ulrich Rädel; Udo Umhofer; Erwin Jäger

doi:10.1117/12.2018269

22 February 2013 Process optimized beam profiles for laser micromachining

Christian Bischoff, Ulrich Rädel, Udo Umhofer, Erwin Jäger

Proceedings Volume 8600, Laser Resonators, Microresonators, and Beam Control XV; 860024 (2013) https://doi.org/10.1117/12.2018269
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

The Gaussian laser beam profile is for many applications in laser micromachining not optimally adapted. Therefore process optimized beam profiles with e.g. Top-Hat or torus shape are required to improve process quality. Other applications require multiple beam-lets for parallel processing to increase process efficiency. TOPAG’s new diffractive FBS (Fundamental Beam-Mode-Shaper) concept allows the generation of square, round or line Top-Hat profiles with near diffraction limited size for smallest possible patterning and spot sizes with just a few micrometers. FBS elements can be placed at nearly any position within the beam path and do not substitute the focusing system (objective) but can be integrated in existing optics. Furthermore the FBS beam shapers feature very homogeneous beam profiles (+/- 2.5%), a high efficiency (> 95%) and simplified handling. In combination with diffractive beam splitters the quality and throughput of the laser process can be improved as a result of several optimized beams from just one beam source. TOPAG presents also application results using FBS shapers and diffractive beam splitters for OLED scribing.

Citation Download Citation

Christian Bischoff, Ulrich Rädel, Udo Umhofer, and Erwin Jäger "Process optimized beam profiles for laser micromachining", Proc. SPIE 8600, Laser Resonators, Microresonators, and Beam Control XV, 860024 (22 February 2013); https://doi.org/10.1117/12.2018269

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available