Experimental study on the absolute measurement of spherical surface with high accuracy

Xi Hou; Weihong Song; Fan Wu; Liming Lu

doi:10.1117/12.2016642

31 January 2013 Experimental study on the absolute measurement of spherical surface with high accuracy

Xi Hou, Weihong Song, Fan Wu, Liming Lu

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87594M (2013) https://doi.org/10.1117/12.2016642
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

The absolute measurement of spherical surface with multiple relative measurements is used widely in high accuracy interferometry, which can obtain the absolute surface data of the tested spherical surface. We present an experimental study on the different absolute methods of two-sphere, random-ball-averaging and shift-rotation to calibrate the spherical reference of a same transmission sphere with high accuracy. The experimental results show that the reference surface deviation measured with the different absolute methods agrees well with each other, with the fact that the difference of rms is ~0.6nm.

Citation Download Citation

Xi Hou, Weihong Song, Fan Wu, and Liming Lu "Experimental study on the absolute measurement of spherical surface with high accuracy", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87594M (31 January 2013); https://doi.org/10.1117/12.2016642

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