Fabrication and properties of SmFe2-PZT magnetoelectric thin films

Ioanna Giouroudi; Mohammed Alnassar; Juergen Kosel

doi:10.1117/12.2016769

17 May 2013 Fabrication and properties of SmFe₂-PZT magnetoelectric thin films

Ioanna Giouroudi, Mohammed Alnassar, Juergen Kosel

Proceedings Volume 8763, Smart Sensors, Actuators, and MEMS VI; 87630G (2013) https://doi.org/10.1117/12.2016769
Event: SPIE Microtechnologies, 2013, Grenoble, France

Abstract

Magnetoelectric (ME) thin film composites are attracting a continually increasing interest due to their unique features and potential applications in multifunctional microdevices and integrated units such as sensors, actuators and energy harvesting modules. By combining piezoelectric and highly magnetostrictive thin films, the potentialities of these materials increase. In this paper we report the fabrication of SmFe₂ and PZT thin films and the investigation of their properties. First of all, a ~ 400 nm thin SmFe film was deposited on top of Si/SiO₂ substrate by magnetron sputter deposition. Afterwards, a 140 nm Pt bottom electrode was sputtered on top of the SmFe film forming a bottom electrode. Spin coating was employed for the deposition of the 150 nm thin PZT layer. A PZT solution with 10 %Pb excess was utilized for this fabrication step. Finally, circular Pt top electrodes were sputtered as top electrodes. This paper focuses on the microstructure of the individual films characterized by X-Ray diffractometer (XRD) and scanning electron microscopy (SEM). A piezoelectric evaluation system, aixPES, with TF2000E analyzer component was used for the electric hysteresis measurements of PZT thin films and a vibrating sample magnetometer (VSM) was employed for the magnetic characterization of the SmFe. The developed thin films and the fabricated double layer SmFe-PZT exhibit both good ferromagnetic and piezoelectric responses which predict a promising ME composite structure. The quantitative chemical composition of the samples was confirmed by energy dispersive spectroscopy (EDX).

Citation Download Citation

Ioanna Giouroudi, Mohammed Alnassar, and Juergen Kosel "Fabrication and properties of SmFe₂-PZT magnetoelectric thin films", Proc. SPIE 8763, Smart Sensors, Actuators, and MEMS VI, 87630G (17 May 2013); https://doi.org/10.1117/12.2016769

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available