Parallelized chromatic confocal sensor systems

Matthias Hillenbrand; Adrian Grewe; Mohamed Bichra; Roman Kleindienst; Lucia Lorenz; Raoul Kirner; Robert Weiß; Stefan Sinzinger

doi:10.1117/12.2020334

13 May 2013 Parallelized chromatic confocal sensor systems

Matthias Hillenbrand, Adrian Grewe, Mohamed Bichra, Roman Kleindienst, Lucia Lorenz, Raoul Kirner, Robert Weiß, Stefan Sinzinger

Author Affiliations +

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87880V (2013) https://doi.org/10.1117/12.2020334
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

In this paper we present chromatic confocal distance sensors for the parallelized evaluation at several lateral positions. The multi-point measurements are performed using either one- or two-dimensional detector arrays. The first sensor combines the concepts of confocal matrix sensing and snapshot hyperspectral imaging to image a two-dimensional array of laterally separated points with one single shot. In contrast to chromatic confocal matrix sensors which use an RGB detector our system works independently from the spectral reflectivity of the surface under test and requires no object-specific calibration. Our discussion of this sensor principle is supported by experimental results. The second sensor is a multipoint line sensor aimed at high speed applications with frame rates of several thousand frames per second. To reach this evaluation speed a one-dimensional detector is employed. We use spectral multiplexing to transfer the information from different measurement points through a single fiber and evaluate the spectral distribution with a conventional spectrometer. The working principle of the second sensor type is demonstrated for the example of a three-point sensor.

Citation Download Citation

Matthias Hillenbrand, Adrian Grewe, Mohamed Bichra, Roman Kleindienst, Lucia Lorenz, Raoul Kirner, Robert Weiß, and Stefan Sinzinger "Parallelized chromatic confocal sensor systems", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880V (13 May 2013); https://doi.org/10.1117/12.2020334

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available