Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application

Ulrich Hofmann; Frank Senger; Joachim Janes; Christian Mallas; Vanessa Stenchly; Thomas von Wantoch; Hans-Joachim Quenzer; Manfred Weiss

doi:10.1117/12.2038249

7 March 2014 Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application

Ulrich Hofmann, Frank Senger, Joachim Janes, Christian Mallas, Vanessa Stenchly, Thomas von Wantoch, Hans-Joachim Quenzer, Manfred Weiss

Author Affiliations +

Proceedings Volume 8977, MOEMS and Miniaturized Systems XIII; 89770A (2014) https://doi.org/10.1117/12.2038249
Event: SPIE MOEMS-MEMS, 2014, San Francisco, California, United States

Abstract

Hermetic wafer level packaging of optical MEMS scanning mirrors is essential for mass-market applications. It is the key to enable reliable low-cost mass producible scanning solutions. Vacuum packaging of resonant MEMS scanning mirrors widens the parameter range specifically with respect to scan angle and scan frequency. It also allows extending the utilizable range of mirror aperture size based on the fact that the energy of the high-Q oscillator can be effectively conserved and accumulated. But there are also some drawbacks associated with vacuum packaging. This paper discusses the different advantageous and disadvantageous aspects of vacuum packaging of MEMS scanning mirrors with respect to laser projection displays. Improved MEMS scanning mirror designs are being presented which focus on overcoming previous limitations. Finally an outlook is presented on the suitability of this technology for very large aperture scanning mirrors to be used in high power laser applications.

Citation Download Citation

Ulrich Hofmann, Frank Senger, Joachim Janes, Christian Mallas, Vanessa Stenchly, Thomas von Wantoch, Hans-Joachim Quenzer, and Manfred Weiss "Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application", Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 89770A (7 March 2014); https://doi.org/10.1117/12.2038249

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