Paper
2 May 2014 Linear to radial/azimuthal polarization converter in transmission using form birefringence in a segmented silicon grating manufactured by high productivity microelectronic technologies
T. Kaempfe, P. Sixt, D. Renaud, A. Lagrange, F. Perrin, O. Parriaux
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Abstract
A polarization rotation is realized by subwavelength binary gratings, where the TE and TM round trip phases of the smallest grating modes are fixed to the smallest possible integer numbers of 2π that allow a straight-through phase difference of π. This results in a subwavelength grating allowing to realize a half-wave element of almost 100% transmission. The principle is applied to a polarization transformation in the 1030-1064 nm wavelength range, using a segmented polarization rotating element converting a linearly polarized incidence to a radial or azimuthal polarization distribution. The elevated costs of such kind of polarization transformers based on assembled birefringent crystals are avoided by using mass-fabrication compatible silicon on insulator technology on a wafer scale. It shows the general potential of microelectronic technology, concerning the batch manufacturing of wavelength-scale diffractive, grating based elements for processing free space waves
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Kaempfe, P. Sixt, D. Renaud, A. Lagrange, F. Perrin, and O. Parriaux "Linear to radial/azimuthal polarization converter in transmission using form birefringence in a segmented silicon grating manufactured by high productivity microelectronic technologies", Proc. SPIE 9130, Micro-Optics 2014, 91300W (2 May 2014); https://doi.org/10.1117/12.2052156
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Cited by 1 scholarly publication.
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KEYWORDS
Polarization

Silicon

Photomasks

Semiconducting wafers

Microelectronics

Transformers

Amorphous silicon

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