High-Resolution Imaging Using Focused-Image Holography With Wave-Front Conjugation

Ginetto Addiego; William G Oldham

doi:10.1117/12.968398

1 January 1988 High-Resolution Imaging Using Focused-Image Holography With Wave-Front Conjugation

Ginetto Addiego, William G Oldham

Proceedings Volume 0922, Optical/Laser Microlithography; (1988) https://doi.org/10.1117/12.968398
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

Experimental results of a high-resolution holographic imaging system using wave-front conjugation are demonstrated. The hologram is created from the information on a master mask that is imaged with a simple single-element lens. The aberrations introduced by the lens are eliminated because the rays retrace the path back-through the lens. The theoretical resolution in the fully coherent imaging system is λ / 2 NA = 0.61 μm ( λ = 488 nm, NA ~0.4). Sub-micrometer resolution of the reconstructed aerial image is experimentally observed over the entire 1 cm diameter field.

Citation Download Citation

Ginetto Addiego and William G Oldham "High-Resolution Imaging Using Focused-Image Holography With Wave-Front Conjugation", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); https://doi.org/10.1117/12.968398

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