Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light

Hidekazu Mimura; Yoshinori Takei; Takahiro Saito; Takehiro Kume; Hiroto Motoyama; Satoru Egawa; Yoko Takeo; Takahiro Higashi

doi:10.1117/12.2187455

26 August 2015 Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light

Hidekazu Mimura, Yoshinori Takei, Takahiro Saito, Takehiro Kume, Hiroto Motoyama, Satoru Egawa, Yoko Takeo, Takahiro Higashi

Author Affiliations +

Proceedings Volume 9588, Advances in X-Ray/EUV Optics and Components X; 95880L (2015) https://doi.org/10.1117/12.2187455
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Mirrors are key devices for creating various systems in optics. Focusing X-ray and extreme ultraviolet (EUV) light requires mirror surfaces with an extremely high accuracy. The figure of an ellipsoidal mirror is obtained by rotating an elliptical profile, and using such a mirror, soft X-ray and EUV light can be focused to dimensions on the order of nanometers without chromatic aberration. Although the theoretical performance of ellipsoidal mirrors is extremely high, the fabrication of an ideal ellipsoidal mirror remains problematic. Based on this background, we have been working to develop a fabrication system for ellipsoidal mirrors. In this proceeding, we briefly introduce the fabrication process and the soft X-ray focusing performance of the ellipsoidal mirror fabricated using the proposed process.

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Hidekazu Mimura, Yoshinori Takei, Takahiro Saito, Takehiro Kume, Hiroto Motoyama, Satoru Egawa, Yoko Takeo, and Takahiro Higashi "Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light", Proc. SPIE 9588, Advances in X-Ray/EUV Optics and Components X, 95880L (26 August 2015); https://doi.org/10.1117/12.2187455

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