Progress in upgrading a long trace profiler at NSRRC

Duan-Jen Wang; Shang-Wei Lin; Shen-Yaw Perng

doi:10.1117/12.2247664

25 October 2016 Progress in upgrading a long trace profiler at NSRRC

Duan-Jen Wang, Shang-Wei Lin, Shen-Yaw Perng

Proceedings Volume 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics; 96870F (2016) https://doi.org/10.1117/12.2247664
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

A long trace profiler in NSRRC is used to develop a bendable mirror, for the mirror-mounting mechanism and to inspect the mirrors of TPS beamlines. We upgraded the air bearing, the motor and gear, the penta-mirror, the CCD and the software. ELCOMATT 3000 is our calibration reference. To maintain constant the measurement of the optical path, we adopted a scheme for a moving optical head that decreases the various optical paths through a focusing lens to avoid lens homogeneity. The measurement environment (temperature, vibration, air turbulence) is effectively controlled. In measuring a curved mirror (radius 9.7 m), the repeatability is below 0.1 μrad. This paper describes the upgraded performance and engineering details.

Citation Download Citation

Duan-Jen Wang, Shang-Wei Lin, and Shen-Yaw Perng "Progress in upgrading a long trace profiler at NSRRC", Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 96870F (25 October 2016); https://doi.org/10.1117/12.2247664

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available