Improvement of crystal orientation in AlN with controlled inversion domain

Shota Tsuda; Takumi Miyagawa; Reiya Aono; Atsushi Tomita; Hideki Hirayama; Yuusuke Takashima; Yoshiki Naoi; Kentaro Nagamatsu

doi:10.1117/12.2607577

5 March 2022 Improvement of crystal orientation in AlN with controlled inversion domain

Shota Tsuda, Takumi Miyagawa, Reiya Aono, Atsushi Tomita, Hideki Hirayama, Yuusuke Takashima, Yoshiki Naoi, Kentaro Nagamatsu

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Proceedings Volume PC12001, Gallium Nitride Materials and Devices XVII; PC120011C (2022) https://doi.org/10.1117/12.2607577
Event: SPIE OPTO, 2022, San Francisco, California, United States

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Shota Tsuda, Takumi Miyagawa, Reiya Aono, Atsushi Tomita, Hideki Hirayama, Yuusuke Takashima, Yoshiki Naoi, and Kentaro Nagamatsu "Improvement of crystal orientation in AlN with controlled inversion domain", Proc. SPIE PC12001, Gallium Nitride Materials and Devices XVII, PC120011C (5 March 2022); https://doi.org/10.1117/12.2607577

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