Recent progress in subwavelength grating metamaterial engineered silicon photonic devices

Juan Gonzalo Wangüemert-Pérez; Carlos Pérez-Armenta; Pablo Ginel-Moreno; José Manuel Luque-González; Abdelfettah Hadij-El Houati; Alejandro Sánchez-Postigo; José de Oliva Rubio; Alejandro Ortega-Moñux; Robert Halir; Jens H. Schmid; Pavel Cheben; Íñigo Molina-Fernández

doi:10.1117/12.2666094

31 May 2023 Recent progress in subwavelength grating metamaterial engineered silicon photonic devices

Juan Gonzalo Wangüemert-Pérez, Carlos Pérez-Armenta, Pablo Ginel-Moreno, José Manuel Luque-González, Abdelfettah Hadij-El Houati, Alejandro Sánchez-Postigo, José de Oliva Rubio, Alejandro Ortega-Moñux, Robert Halir, Jens H. Schmid, Pavel Cheben, Íñigo Molina-Fernández

Author Affiliations +

Proceedings Volume PC12575, Integrated Optics: Design, Devices, Systems and Applications VII; PC125750A (2023) https://doi.org/10.1117/12.2666094
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

In this talk we present our recent advances in SWG metamaterial engineering. We will show a 1D-optical phased array composed of 112 evanescent-coupled surface emitting antennas with a length of 1.5 mm and fed by a compact distributed Bragg deflector. The measurements demonstrate a wavelength-steerable collimated beam with a far-field angular divergence of 1.8o × 0.2o. Experimental results of a bricked SWG 2×2 MMI coupler are also shown, achieving polarization agnostic performance in the 1500nm to 1560nm wavelength range. Both devices were fabricated on a standard 220-nm SOI platform using a single full-etch step process, with a minimum feature size of 80 nm, and thus compatible with immersion deep-UV lithography.

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Juan Gonzalo Wangüemert-Pérez, Carlos Pérez-Armenta, Pablo Ginel-Moreno, José Manuel Luque-González, Abdelfettah Hadij-El Houati, Alejandro Sánchez-Postigo, José de Oliva Rubio, Alejandro Ortega-Moñux, Robert Halir, Jens H. Schmid, Pavel Cheben, and Íñigo Molina-Fernández "Recent progress in subwavelength grating metamaterial engineered silicon photonic devices", Proc. SPIE PC12575, Integrated Optics: Design, Devices, Systems and Applications VII, PC125750A (31 May 2023); https://doi.org/10.1117/12.2666094

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KEYWORDS

Metamaterials

Silicon photonics

Collimation

Lithography

Polarization

Waveguides

Optical filters

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