CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12653 > Article
Presentation
5 October 2023 Visible meta-optics reality: Volume production enabled by NIL
Bradley R. Williams, Daniel Bacon-Brown, Matthew C. George, Rumyana Petrova, Adam W. Korb, Jamie C. Stocks
Author Affiliations +
Proceedings Volume PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX; PC126530B (2023) https://doi.org/10.1117/12.2677387
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States
Abstract
Meta-optics have been built in lab settings for years but not on a commercially viable scale. Using electron beam lithography works well in the lab, but this is not an option for volume manufacturing. Patterning subwavelength meta-atom for visible has been just beyond the capabilities of the high-volume deep UV lithography. Due to this patterning barrier, entry into visible meta-optic volume manufacturing has not yet been possible. Moxtek has overcome this barrier and established a volume process line for visible meta-optics utilizing nanoimprint lithography (NIL). Process stability data to qualify the process line for visible meta-optics, confirms that volume manufacturing of metalenses is possible and the patterning barrier has been removed.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Bradley R. Williams, Daniel Bacon-Brown, Matthew C. George, Rumyana Petrova, Adam W. Korb, and Jamie C. Stocks "Visible meta-optics reality: Volume production enabled by NIL", Proc. SPIE PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX, PC126530B (5 October 2023); https://doi.org/10.1117/12.2677387
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Nanoimprint lithography
Manufacturing
Electron beam lithography
Optics manufacturing
Deep ultraviolet
High volume manufacturing
Lithography
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top