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CyberOptics will be demonstrating the new In-Line Particle Sensor™ (IPS) as an extension of the industry-leading particle sensing technology. The new In-Line Particle Sensor with CyberSpectrum™ software detects particles in gas and vacuum lines 24/7 in semiconductor process equipment. The IPS quickly identifies, monitors and enables troubleshooting of particles down to 0.1μm. CyberOptics' ReticleSense® Auto Multi Sensor™ (AMSR) measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device. The AMSR can capture multiple measurements in all locations – providing yet another way to increase yield and reduce downtime in semiconductor environments. The Airborne Particle Sensor™ (APSRQ) quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14µm within process equipment and automated material handling systems. CyberOptics Corporation is a leading global developer and manufacturer of high-precision 3D sensing technology solutions.CyberOptics' sensors are used for inspection and metrology in the SMT and semiconductor capital equipment markets to significantly improve yields and productivity. By leveraging its leading edge technologies, the Company has strategically established itself as a global leader in high precision 3D sensors, allowing CyberOptics to further increase its penetration of key vertical markets. Headquartered in Minneapolis, Minnesota, CyberOptics conducts worldwide operations through its facilities in North America, Asia and Europe. Visit www.cyberoptics.com for more information.
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