Guest Editorial: Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Yu-Cheng Lin

doi:10.1117/1.3155403

1 April 2009 Guest Editorial: Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Yu-Cheng Lin

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 2, 021101 (April 2009). https://doi.org/10.1117/1.3155403

This PDF file contains the editorial “Guest Editorial: Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS” for JM3 Vol. 8 Issue 02

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Yu-Cheng Lin "Guest Editorial: Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 021101 (1 April 2009). https://doi.org/10.1117/1.3155403

Published: 1 April 2009

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KEYWORDS

Microelectromechanical systems

BioMEMS

Transducers

Microopto electromechanical systems

Actuators

Materials science

Microfluidics

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