Development of a micropump for Bio-MEMS using a new biocompatible piezoelectric material MgSiO3

Eiji Nakamachi; Hwisim Hwang; Noriaki Okamoto; Yusuke Morita

doi:10.1117/1.3624515

1 July 2011 Development of a micropump for Bio-MEMS using a new biocompatible piezoelectric material MgSiO₃

Eiji Nakamachi, Hwisim Hwang, Noriaki Okamoto, Yusuke Morita

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 3, 033013 (July 2011). https://doi.org/10.1117/1.3624515

Abstract

A micropump of biomedical-microelectric mechanical system (Bio-MEMS) for drug delivery systems and health monitoring systems using a new biocompatible piezoelectric thin film was developed. We first assessed the performance of our piezoelectric thin film pump of a newly designed microfluid system using the finite element method. Numerical results show a sufficient transportation ability of our micropump system for blood tests. We generated a multilayer MgSiO₃ thin film on Cu/Ti/Si (100) substrate using RF-magnetron sputtering. We measured the crystallographic orientation and piezoelectric property of the thin film and confirmed that MgSiO₃ (101) crystal grew well. The strain constant d₃₃ was calculated as 179.4 pm/V using the displacement-voltage curve. Furthermore, the deflection and eigenfrequency of the monomorph-actuator, fabricated using a micromachining process, were measured using the laser Doppler vibrometer, which revealed that the deflection linearly increased with applied voltage: it was 82.6 nm with applied voltage of 15 V. We measured the flow rate of a micropump using the luminance difference measurement method. Results showed that the maximum flow rate was 7.1 nl/s at the applied voltage of 15 V. We concluded that our newly developed MgSiO₃ monomorphic micropump can be a comprehensive Bio-MEMS device.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Eiji Nakamachi, Hwisim Hwang, Noriaki Okamoto, and Yusuke Morita "Development of a micropump for Bio-MEMS using a new biocompatible piezoelectric material MgSiO₃," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(3), 033013 (1 July 2011). https://doi.org/10.1117/1.3624515

Published: 1 July 2011

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