Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application

Jinkui Chu; Jiali Gao; Le Guan; Guoqing Zhang; Ze Liu

doi:10.1117/1.JMM.11.2.023006

1 June 2012 Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application

Jinkui Chu, Jiali Gao, Le Guan, Guoqing Zhang, Ze Liu

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 2, 023006 (June 2012). https://doi.org/10.1117/1.JMM.11.2.023006

Abstract

This work presents the mechanical characterization of SU-8 photoresists studied in the form of microscaled free-standing thin films with various effective length/width (aspect) ratios, achieved by a tensile testing method. Specimens were designed with gauge segments measuring 240 to 540 μm long and 40 to 80 μm wide with thickness fixed at 20 μm, all fabricated in the same processing conditions. The experiments were carried out on a microtensile testing system which had a load and displacement resolution of 0.25 mN and 10 nm, respectively. With a tensile loading speed of 0.02 μm/s, the average fracture strength of SU-8 photoresist was measured to be 66.34 MPa, and the calculated Young's modulus ranged from 0.86 to 2.33 GPa and the maximum strain from 1.02% to 9.70%, with variation dependent on the effective aspect ratio of the tested films. As a result, effective aspect ratio is concluded to be a significant factor mechanically charactering the size effect of SU-8 photoresist in microscale.

Citation Download Citation

Jinkui Chu, Jiali Gao, Le Guan, Guoqing Zhang, and Ze Liu "Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 023006 (1 June 2012). https://doi.org/10.1117/1.JMM.11.2.023006

Published: 1 June 2012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available