Deep silicon etching for thermopile structures using a modified Bosch process

Na Zhou; Junjie Li; Henry Radamson; Lin Li; Qifeng Jiang; Junfeng Li

doi:10.1117/1.JMM.18.2.024501

10 May 2019 Deep silicon etching for thermopile structures using a modified Bosch process

Na Zhou, Junjie Li, Henry Radamson, Lin Li, Qifeng Jiang, Junfeng Li

Author Affiliations +

Funded by: Ministry of Science and Technology of China

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 2, 024501 (May 2019). https://doi.org/10.1117/1.JMM.18.2.024501

Abstract

We present a simple method of deep anisotropic etching of silicon up to 400 μm with nearly vertical sidewall profile for thermopile devices. The method is based on the time-multiplexed etching which is a modified case of the Bosch deep reactive ion etching process. This process is mainly adjusted by chuck power and it is divided into three steps which are zero bias deposition step, high bias polymer removing step, and low bias silicon etching step. Compared with the standard Bosch process, this modified strategy shows advantage of etch rate and selectivity.

Citation Download Citation

Na Zhou, Junjie Li, Henry Radamson, Lin Li, Qifeng Jiang, and Junfeng Li "Deep silicon etching for thermopile structures using a modified Bosch process," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(2), 024501 (10 May 2019). https://doi.org/10.1117/1.JMM.18.2.024501

Received: 22 November 2018; Accepted: 22 April 2019; Published: 10 May 2019

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE