Period and height control during the microcontact printing of alkoxysilane for optical gratings

Arnaud Benahmed; Robert Lam; Nicholaus Rechner; Chih-Ming Ho

doi:10.1117/1.2731384

1 April 2007 Period and height control during the microcontact printing of alkoxysilane for optical gratings

Arnaud Benahmed, Robert Lam, Nicholaus Rechner, Chih-Ming Ho

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 6, Issue 2, 023007 (April 2007). https://doi.org/10.1117/1.2731384

Abstract

We present a one-step replication technique for optical gratings that allows the control of the corrugation height and period. By using an ink that slowly condenses into a multilayer polymer, it is possible to control the corrugation height by changing the condensation time. In addition, by applying a mechanical strain on the stamp, it is also possible to change the period of the grating. The combination of these two features added to the ease of use and low cost of this technique makes it very attractive for the fast prototyping of optical gratings for applications such as the measurement of surface plasmon band gaps. Corrugation heights in the range of 100 to 250 nm and period variations up to 10% are achieved.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Arnaud Benahmed, Robert Lam, Nicholaus Rechner, and Chih-Ming Ho "Period and height control during the microcontact printing of alkoxysilane for optical gratings," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(2), 023007 (1 April 2007). https://doi.org/10.1117/1.2731384

Published: 1 April 2007

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