Optical performance of amorphous hydrogenated carbon layers: range of optical constants achievable

Olaf Stenzel; Ralf Petrich

doi:10.1117/12.147696

1 November 1993 Optical performance of amorphous hydrogenated carbon layers: range of optical constants achievable

Olaf Stenzel, Ralf Petrich

Author Affiliations +

Optical Engineering, Vol. 32, Issue 11, (November 1993). https://doi.org/10.1117/12.147696

Abstract

The optical properties of differently deposited amorphous carbon layers have been investigated by spectrophotometric means from the middle infrared up to the visible spectral region. The optical constants of the layers could be calculated by a numerical procedure that combines features of single-wavelength methods and multiwavelength methods. Depending on the deposition technique applied, the optical constants of the layers have been found to vary over a wide range. Thus, refractive index values could be established between 1.6 and 2.9, while IR-absorption coefficients vary between 20/cm and 40,000/cm. The optical performance of the layers is thus nonuniform and may be influenced by the selection of suitable deposition parameters. Due to the potentially wide range of optical constants of amorphous carbon, various possibilities exist for the application as an optical thin film material. Applications such as selective absorber coatings for solar physical purposes are discussed as well as mechanically and chemically resistant antireflection coatings on high-refractive index semiconducting materials (silicon, germanium).

Citation Download Citation

Olaf Stenzel and Ralf Petrich "Optical performance of amorphous hydrogenated carbon layers: range of optical constants achievable," Optical Engineering 32(11), (1 November 1993). https://doi.org/10.1117/12.147696

Published: 1 November 1993

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available