Surface profilometry by a parallel-mode confocal microscope

Radim Chmelik; Zdenek Harna

doi:10.1117/1.1461832

1 April 2002 Surface profilometry by a parallel-mode confocal microscope

Radim Chmelik, Zdenek Harna

Optical Engineering, Vol. 41, Issue 4, (April 2002). https://doi.org/10.1117/1.1461832

Confocal imaging by a parallel-mode confocal microscope is based on the real-time incoherent-holography technique. Besides the image amplitude, the image phase is inherently reconstructed. In this paper we prove that the phase image component can be converted into the height map, and, in this way, we measure the surface profile with the precision of several nanometers. Small height differences can be measured inside one optical section of the specimen surface, while the measurement of large differences needs to connect more optical sections. The two procedures are demonstrated experimentally even for the surface with large and steep height changes. The ambiguity in the height determination from the image phase component is overcome by means of the depth discrimination property of the microscope. The axial resolution is improved using broadband illumination.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Radim Chmelik and Zdenek Harna "Surface profilometry by a parallel-mode confocal microscope," Optical Engineering 41(4), (1 April 2002). https://doi.org/10.1117/1.1461832

Published: 1 April 2002

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available