Radial-quality uniformity investigations of large-area thick Al films

Haigui Yang; Zizheng Li; Xiaoyi Wang; Zhenfeng Shen; Jinsong Gao; Shanwen Zhang

doi:10.1117/1.OE.54.4.045106

28 April 2015 Radial-quality uniformity investigations of large-area thick Al films

Haigui Yang, Zizheng Li, Xiaoyi Wang, Zhenfeng Shen, Jinsong Gao, Shanwen Zhang

Author Affiliations +

Optical Engineering, Vol. 54, Issue 4, 045106 (April 2015). https://doi.org/10.1117/1.OE.54.4.045106

Abstract

The fabrication of high-quality large-area thick Al films with a thickness around 10 μm or even more is one of the most important factors to realize high-performance large-size echelle gratings. During the deposition process of large-area Al films, Al film quality generally exhibits a different behavior along the radius (R) direction, which seriously affects the performance of echelle gratings. In this study, for the first time, we investigate the radial-quality uniformity of large-area (R=400 mm) thick (<10 μm) Al films in detail. We not only analyze the radial-quality difference of Al films prepared by the traditional electron-beam evaporation process, but also significantly improve the radial-quality uniformity of large-area thick Al films by using a coevaporation process. By comparing two kinds of film coating processes, we clarify the origin of the radial-quality difference of Al films, and prepare large-area thick Al films with excellent radial-quality uniformity.

Citation Download Citation

Haigui Yang, Zizheng Li, Xiaoyi Wang, Zhenfeng Shen, Jinsong Gao, and Shanwen Zhang "Radial-quality uniformity investigations of large-area thick Al films," Optical Engineering 54(4), 045106 (28 April 2015). https://doi.org/10.1117/1.OE.54.4.045106

Published: 28 April 2015

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