Simulating semiconductor structures for next-generation optical inspection technologies

Ori Golani; Ido Dolev; James Pond; Jens Niegemann

doi:10.1117/1.OE.55.2.025102

2 February 2016 Simulating semiconductor structures for next-generation optical inspection technologies

Ori Golani, Ido Dolev, James Pond, Jens Niegemann

Author Affiliations +

Optical Engineering, Vol. 55, Issue 2, 025102 (February 2016). https://doi.org/10.1117/1.OE.55.2.025102

Abstract

We present a technique for optimizing advanced optical imaging methods for nanoscale structures, such as those encountered in the inspection of cutting-edge semiconductor devices. The optimization flow is divided to two parts: simulating light-structure interaction using the finite-difference time-domain (FDTD) method and simulating the optical imaging system by means of its optical transfer function. As a case study, FDTD is used to simulate 10-nm silicon line-space and static random-access memory patterns, with irregular structural protrusions and silicon-oxide particles as defects of interest. An ultraviolet scanning-spot optical microscope is used to detect these defects, and the optimization flow is used to find the optimal imaging mode for detection.

Citation Download Citation

Ori Golani, Ido Dolev, James Pond, and Jens Niegemann "Simulating semiconductor structures for next-generation optical inspection technologies," Optical Engineering 55(2), 025102 (2 February 2016). https://doi.org/10.1117/1.OE.55.2.025102

Published: 2 February 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available