This paper presents the design and testing of a new CO2 gas sensor that is based on a piezoelectric Langasite (La3Ga5SiO14) crystal resonator with temperature compensation. CO2 gas concentration change can be measured by monitoring frequency shift due to the adsorption of CO2 gas molecules. The sensor is designed and fabricated as a body acoustic wave (BAW) resonator, and coated with Zinc Oxide thin film for sensitivity improvement. Then it is experimentally tested in the laboratory with a self-designed, temperature controlled gas chamber at a wide CO2 concentration range. Moreover, temperature compensation is formulated and tested by applying the dual mode behavior of the Langasite BAW resonator. The sensor shows a good relationship between CO2 gas concentration and its resonant frequency shift. The proposed sensor can be applied at high temperatures particularly in combustion engines, power plant and other high temperature applications.
Development of indigenous CO2 sensing element operated at an extreme operating temperature (≥ 350 °C) is highly desirable. Use of langasite based surface acoustic wave (SAW) gas sensors is extremely advantageous compared to other commercially available sensors as it can operate at a higher temperature (> 300 °C). Only a few literature reports exist which demonstrated a high-temperature CO2 gas sensor. In the present study, we have demonstrated CO2 sensing properties using langasite based SAW sensors. The temperature-dependent gas sensing characteristics have been determined by observing frequency shift due to the adsorption of gas molecules.
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