Dr. Akio Higo Profile

Dr. Akio Higo

Project Lecturer at Univ of Tokyo

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Publications (3)

Proceedings Article | 17 November 2016 Paper

Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching

S. Samukawa, Shuichi Noda, Akio Higo, Manabu Yasuda, Kazumi Wada

Proceedings Volume 10027, 100270Q (2016) https://doi.org/10.1117/12.2247702

KEYWORDS: Nanowires, Etching, Nanolithography, Luminescence, Germanium, Silicon, Gallium arsenide, Iron, Ions, Plasma

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Proceedings Article | 13 March 2013 Paper

InGaAsP optical device integration on SOI platform by Ar/O2 plasma assisted bonding

A. Higo, L. Li, E. Higurashi, M. Sugiyama, Y. Nakano

Proceedings Volume 8616, 86160X (2013) https://doi.org/10.1117/12.2008337

KEYWORDS: Silicon, Plasma, Semiconductor lasers, Hybrid silicon lasers, Oxygen, Argon, Electromagnetic coupling, Optical components, Compound semiconductors, Waveguides

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SPIE Journal Paper | 1 April 2011

Monolithically integrated low-loss three-dimensional spot-size converter and silicon photonic waveguides constructed by nanotuned Bosch process and oxidation

Ling-Han Li, Akio Higo, Masakazu Sugiyama, Yoshiaki Nakano

JM3, Vol. 10, Issue 02, 023002, (April 2011) https://doi.org/10.1117/12.10.1117/1.3574143

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