Dr. Alan F. Krauss Profile

Dr. Alan F. Krauss

Principal Engineer at Schneider Electric

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Publications (1)

Proceedings Article | 29 April 2004 Paper

PVD fault detection using disparate integrated data sources

Alan Krauss

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.540790

KEYWORDS: Semiconducting wafers, Sensors, Power supplies, Plasma, Data integration, Signal detection, Photonic integrated circuits, Transducers, Signal attenuation, Metrology

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