Dr. Antonela Comisso Profile

Dr. Antonela Comisso

at CNR-IFN Padova

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Author

Publications (3)

SPIE Journal Paper | 14 September 2016

Optical constants of e-beam evaporated titanium dioxide thin films in the 25.5- to 612-eV energy region

Antonela Comisso, Marco Nardello, Angelo Giglia, Piergiorgio Nicolosi

OE, Vol. 55, Issue 09, 095102, (September 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.9.095102

KEYWORDS: Titanium dioxide, Reflectivity, Titanium, Thin films, Silicon, X-rays, Statistical modeling, Contamination, Interfaces, Extreme ultraviolet

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Proceedings Article | 12 May 2015 Paper

Optical and structural characterization of CeO2/B4C multilayers near boron K-edge energy

M. G. Sertsu, A. Giglia, S. Brose, A. Comisso, Z. S. Wang, L. Juschkin, P. Nicolosi

Proceedings Volume 9510, 95100T (2015) https://doi.org/10.1117/12.2181820

KEYWORDS: Reflectivity, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Boron, Multilayers, Interfaces, X-rays, Diffusion, Grazing incidence

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Proceedings Article | 12 May 2015 Paper

Characterization of TiO2 thin films in the EUV and soft x-ray region

A. Comisso, A. Giglia, M. Nardello, E. Tessarolo, L. Calvillo, M. G. Sertsu, G. Granozzi, F. Gerlin, L. Brigo, P. Nicolosi

Proceedings Volume 9510, 95100Z (2015) https://doi.org/10.1117/12.2178142

KEYWORDS: Thin films, Reflectivity, Extreme ultraviolet, X-rays, Surface roughness, Titanium, Refractive index, Silicon, X-ray optics, Titanium dioxide

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