Ms. Ayako Sugimoto Profile

Ayako Sugimoto

at Nikon Corp.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper

Takahisa Kikuchi, Ayako Sugimoto, Shigeru Eto, Akira Okutomi, Naoki Morita

Proceedings Volume 11327, 113270W (2020) https://doi.org/10.1117/12.2551973

KEYWORDS: Semiconducting wafers, Optical alignment, Scanners, Machine learning, Overlay metrology, Bessel functions, Metrology, Integration

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases