Dr. Bharat Kumar Profile

Dr. Bharat Kumar

at IBM Thomas J. Watson Research Ctr.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 3 October 2018 Presentation + Paper

Study of resist hardmask interaction through surface activation layers

Anuja De Silva, Luciana Meli, Jing Guo, Jennifer Church, Nelson Felix, Dario Goldfarb, Bharat Kumar, Rudy Wojtecki, Magi Mettry, Alexander Hess

Proceedings Volume 10809, 1080916 (2018) https://doi.org/10.1117/12.2501824

KEYWORDS: Polymers, Semiconductors, Interfaces, Silicon, Head-mounted displays, Etching, Electron beam lithography, Optical lithography, Semiconductor materials, Oxides

Read Abstract +

Proceedings Article | 28 March 2018 Paper

Aqueous developers for positive tone ultrathin chemically amplified EUV resists

Dario Goldfarb, Bharat Kumar

Proceedings Volume 10586, 1058604 (2018) https://doi.org/10.1117/12.2297380

KEYWORDS: Photoresist developing, Extreme ultraviolet, Standards development, Polymers, Interfaces, Extreme ultraviolet lithography, Photoresist materials, Quartz, Crystals, Convolution

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years