Dr. Bob Rollinger Profile

Dr. Bob Rollinger

Senior Researcher at ETH Zürich

SPIE Involvement:

Author

Publications (12)

SPIE Journal Paper | 5 August 2015 Open Access

Spectral emission properties of a laser-produced plasma light source in the sub-200 nm range for wafer inspection applications

Nadia Gambino, Bob Rollinger, Duane Hudgins, Reza Abhari

JM3, Vol. 14, Issue 03, 034002, (August 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.034002

KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Ions, Indium, Extreme ultraviolet, Calibration, Inspection

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Proceedings Article | 19 March 2015 Paper

Spectral emission properties of a LPP light source in the sub-200nm range for wafer inspection applications

Nadia Gambino, Bob Rollinger, Duane Hudgins, Reza Abhari, F. Abreau

Proceedings Volume 9424, 942418 (2015) https://doi.org/10.1117/12.2085806

KEYWORDS: Plasma, Vacuum ultraviolet, Tin, Gallium, Light sources, Indium, Inspection, Extreme ultraviolet, Ions, Wafer inspection

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Proceedings Article | 19 March 2015 Paper

LPP light source for actinic HVM inspection applications

Bob Rollinger, Nadia Gambino, Duane Hudgins, Alexander Sanders, Markus Brandstätter, Reza Abhari, F. Abreau

Proceedings Volume 9422, 94222K (2015) https://doi.org/10.1117/12.2085794

KEYWORDS: Extreme ultraviolet, Plasma, Inspection, Tin, Extreme ultraviolet lithography, Coded apertures, Aluminium phosphide, Light sources, Photomasks, Control systems

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Proceedings Article | 17 April 2014 Paper

Clean and stable LPP light source for HVM inspection applications

Bob Rollinger, Nadia Gambino, Andrea Giovannini, Luna Bozinova, Flori Alickaj, Konrad Hertig, Reza Abhari, Fariba Abreau

Proceedings Volume 9048, 90482K (2014) https://doi.org/10.1117/12.2046416

KEYWORDS: Extreme ultraviolet, Inspection, Aluminium phosphide, Tin, Plasma, Extreme ultraviolet lithography, Light sources, Metrology, High power lasers, Nd:YAG lasers

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Proceedings Article | 17 April 2014 Paper

Temporal and spatial dynamics of a laser-produced plasma through a multiple Langmuir probe detector

Nadia Gambino, Markus Brandstätter, Bob Rollinger, Reza Abhari

Proceedings Volume 9048, 90482I (2014) https://doi.org/10.1117/12.2046378

KEYWORDS: Plasma, Ions, Extreme ultraviolet, Sensors, Aluminium phosphide, Tin, Extreme ultraviolet lithography, High power lasers, Particles, Laser development

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SPIE Journal Paper | 11 June 2012

Laser-produced plasma light source for extreme-ultraviolet lithography applications

Reza Abhari, Bob Rollinger, Andrea Giovannini, Oran Morris, Ian Henderson, Samir Ellwi

JM3, Vol. 11, Issue 02, 021114, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021114

KEYWORDS: Extreme ultraviolet, Plasma, Tin, Extreme ultraviolet lithography, Ions, Light sources, Mirrors, Lithography, Inspection, Laser applications

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Proceedings Article | 23 March 2012 Paper

Tin droplets for LPP EUV sources

Bob Rollinger, Luna Bozinova, Nadia Gambino, Reza Abhari

Proceedings Volume 8322, 83222P (2012) https://doi.org/10.1117/12.916683

KEYWORDS: Extreme ultraviolet, Tin, Metrology, Pulsed laser operation, Plasma, Laser stabilization, Control systems, High power lasers, Extreme ultraviolet lithography, Inspection

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Proceedings Article | 8 April 2011 Paper

Stable tin droplets for LPP EUV sources

Bob Rollinger, Oran Morris, Reza Abhari

Proceedings Volume 7969, 79692W (2011) https://doi.org/10.1117/12.879538

KEYWORDS: Extreme ultraviolet, Tin, Extreme ultraviolet lithography, Metrology, Plasma, Ions, Pulsed laser operation, Chemical species, Laser stabilization, Mirrors

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Proceedings Article | 23 March 2010 Paper

Tin ion and neutral dynamics within an LPP EUV source

Bob Rollinger, Oran Morris, Ndaona Chokani, Reza Abhari

Proceedings Volume 7636, 76363F (2010) https://doi.org/10.1117/12.846557

KEYWORDS: Ions, Tin, Extreme ultraviolet, Plasma, Sputter deposition, Optical simulations, Particles, Pulsed laser operation, Molybdenum, Monte Carlo methods

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Proceedings Article | 18 March 2009 Paper

Kinetic simulation of debris from an LPP EUV source

Bob Rollinger, Andrea Giovannini, Davide Bleiner, Ndaona Chokani, Reza Abhari

Proceedings Volume 7271, 72712W (2009) https://doi.org/10.1117/12.814150

KEYWORDS: Ions, Particles, Extreme ultraviolet, Mirrors, Plasma, Tin, Near field optics, Extreme ultraviolet lithography, Atomic, molecular, and optical physics, Reflectivity

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Proceedings Article | 27 March 2008 Paper

Characteristics of a minimum-debris optimum conversion efficiency tin-based LPP source

Bob Rollinger, Davide Bleiner, Ndaona Chokani, Reza Abhari

Proceedings Volume 6921, 692110 (2008) https://doi.org/10.1117/12.771641

KEYWORDS: Spherical lenses, Extreme ultraviolet, Ions, Plasmas, Pulsed laser operation, Optical simulations, Liquids, Solids, Nd:YAG lasers, Atomic, molecular, and optical physics

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Proceedings Article | 21 March 2008 Paper

Parametric tradeoffs in laser plasma sources for EUV lithography: debris versus radiators

Davide Bleiner, Bob Rollinger, Reza Abhari

Proceedings Volume 6921, 69210X (2008) https://doi.org/10.1117/12.772613

KEYWORDS: Ions, Tin, Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Solids, Visualization, Mass spectrometry, EUV optics, Laser ablation

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Showing 5 of 12 publications

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