Mr. Brad Austin Profile

Brad Austin

at IBM Thomas J Watson Research Ctr

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Author

Publications (2)

SPIE Journal Paper | 1 July 2020 Open Access

Fundamental characterization of stochastic variation for improved single-expose extreme ultraviolet patterning at aggressive pitch

Jennifer Church, Luciana Meli, Jing Guo, Martin Burkhardt, Chris Mack, Anuja De Silva, Karen Petrillo, Mary Breton, Ravi Bonam, Romain Lallement, Eric Miller, Brad Austin, Shravan Matham, Nelson Felix

JM3, Vol. 19, Issue 03, 034001, (July 2020) https://doi.org/10.1117/12.10.1117/1.JMM.19.3.034001

KEYWORDS: Stochastic processes, Fiber optic illuminators, Line edge roughness, Critical dimension metrology, Defect inspection, Extreme ultraviolet, Inspection, Optical lithography, Yield improvement

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Proceedings Article | 23 March 2020 Presentation + Paper

Fundamental characterization of stochastic variation for improved single-expose EUV patterning at aggressive pitch

Jennifer Church, Luciana Meli, Jing Guo, Martin Burkhardt, Chris Mack, Anuja DeSilva, Karen Petrillo, Mary Breton, Ravi Bonam, Romain Lallement, Eric Miller, Brad Austin, Shravan Matham, Nelson Felix

Proceedings Volume 11323, 113230O (2020) https://doi.org/10.1117/12.2551487

KEYWORDS: Stochastic processes, Line edge roughness, Inspection, Defect inspection, Critical dimension metrology, Extreme ultraviolet, Optical lithography, Etching, Bridges

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