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Brad Williams
CEO at Capitol Scientific Dallas LLC
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Publications (2)
Proceedings Article | 11 June 1999 Paper
Top antireflective coating process for deep-UV lithography
Allen Fung, Binder Mann, Ronald Eakin, Pierre Silvestre, Brad Williams, Jason Miyake, Yusuke Takano
Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350147
KEYWORDS: Critical dimension metrology, Deep ultraviolet, Reflectivity, Semiconducting wafers, Oxides, Antireflective coatings, Photoresist processing, Lithography, Chemical mechanical planarization, Thin film coatings
Proceedings Article | 29 June 1998 Paper
Process effects resulting from conversion to a safe-solvent organic BARC
James Cox, Lynn Welsh, Deborah Murphy, Ronald Eakin, Pierre Silvestre, Ralph Dammel, Shuji Ding, Brad Williams, Dinesh Khanna
Proceedings Volume 3333, (1998) https://doi.org/10.1117/12.312394
KEYWORDS: Semiconducting wafers, Photoresist materials, Reflectivity, Coating, Thin film coatings, Etching, Silicon, Antireflective coatings, Silicon films, Quartz
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