It is difficult for Fizeau interferometer to take its common optical path characteristics and anti-vibration measurement requirements into account. In this paper, a dynamic Fizeau interferometer (DFI) is proposed for anti-vibration optical measurement, and the advantages of common optical path and high accuracy of Fizeau interferometer are retained. DFI is divided into conventional Fizeau interferometer and vibration measurement part. An assistant mirror is added to the vibration measurement part to separate the information of the reference wavefront and the test wavefront with the shortcoherence laser. The vibration information of the Fizeau cavity is obtained by measuring the vibration of each surface separately. The vibration coefficients of the reference wavefront and the test wavefront are extracted by the algorithm, and then combined with the interferograms of the Fizeau interference part. The phase to be measured is finally recovered. DFI provides a solution for anti-vibration measurement of Fizeau interferometry, which has high application value in optical measurement.
In this paper, a Fizeau interferometer with double interference cavity is proposed to solve the influence of the environmental factors in high precision phase measurement. The proposed method adds a reference mirror, combined with a low-coherence source, to construct two interference cavities, which have the synchronous phase change. One of them has an adjustable spatial carrier frequency, which is used to calculate the relative deformation phase during the test, while the other has the same null fringe with the standard Fizeau interferometer. The measured phase can be retrieved by using the least square method with the calculated deformation phase and null fringe patterns. In addition, the visibility of the fringe of the two interference cavities are analyzed. Simulation and experiment demonstrate that the proposed method can realize the dynamic measurement of the mirror under the influence of the time-varying environment, and has reliable measurement accuracy.
A two-step iterative algorithm (TSIA) immune to tilt shifts is proposed for phase extraction in phase-shifting interferometry (PSI). The TSIA constructs a model of the least-squares iteration of the phase distribution and the tilt shifts based on parametric decoupling. Finally, the phase distribution is extracted via the least-squares method. The experimental results show that the PTI has high accuracy and fast iterative convergence speed for the conditions of the large amplitude of tilt shifts, closed fringes, nonuniform background and modulation.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.