Dr. Changsoo Jang Profile

Dr. Changsoo Jang

at Univ of Maryland

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Publications (3)

SPIE Journal Paper | 1 October 2009

In situ measurement of gas diffusion properties of polymeric seals used in MEMS packages by optical gas leak testing

Changsoo Jang, Arindam Goswami, Bongtae Han, Suk-Jin Ham

JM3, Vol. 8, Issue 04, 043025, (October 2009) https://doi.org/10.1117/12.10.1117/1.3227904

KEYWORDS: Diffusion, Polymers, Microelectromechanical systems, In situ metrology, Optical testing, Fringe analysis, Calibration, Helium, Interferometry, Finite element methods

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Proceedings Article | 9 February 2009 Paper

In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test

Bongtae Han, Changsoo Jang, Arindam Goswami

Proceedings Volume 7206, 720607 (2009) https://doi.org/10.1117/12.810001

KEYWORDS: Polymers, Diffusion, Optical testing, Microelectromechanical systems, Fringe analysis, Helium, Calibration, Interferometry, Oxygen, Temperature metrology

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Proceedings Article | 9 February 2009 Paper

Fine leak batch testing of multiple MEMS packages

Bongtae Han, Byeng Dong Youn, Suk-Jin Ham, Changsoo Jang

Proceedings Volume 7206, 720605 (2009) https://doi.org/10.1117/12.810004

KEYWORDS: Helium, Data modeling, Microelectromechanical systems, Diffusion, Inspection, Spectroscopy, Analytical research, Molecules, Palladium, Error analysis

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