A novel inverse approach is proposed for in situ measurement of gas diffusion properties of polymeric seals used in microelectromechanical systems (MEMS) packages. The cavity pressure evolution of a polymer-sealed MEMS package subjected to a constant bombing pressure is documented as a function of time using classical interferometry, and the diffusion properties of the polymeric seal are subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse analysis is established considering three diffusion regimes that characterize the leak behavior through a polymeric seal. The method is implemented to determine the helium diffusivity and solubility of a polymeric seal.
A novel inverse approach based on an optical leak test is developed and implemented for in-situ measurement of gas
diffusion properties of polymeric seals used in MEMS packages. Cavity pressure evolution during a leak test is
documented as a function of time using laser-based interferometry, and the diffusion properties of a polymeric seal are
subsequently determined from the measured pressure history. A comprehensive numerical procedure for the inverse
analysis is established considering three diffusion regimes that characterize the leak behavior through a polymer seal.
The method is demonstrated successfully to determine the helium diffusivity and solubility of the polymeric seal used in
a package.
An analysis method for fine leak batch testing is developed for effective hermeticity inspection of metal-sealed MEMS
packages in a mass production environment. It employs a forward-stepwise regression analysis based on a physical gas
flow model to infer the information of leaky packages from batch test data. The proposed method can determine
accurately the number of leaky packages and the true leak rate of each leaky package when the number of leaky
packages in a batch is less than 5. A top-down hierarchical batch test is proposed as a reliable and effective test scheme
by addressing this limitation of the developed analysis scheme.
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