In this study, we propose and demonstrate a reflex optical phased array (OPA) chip, represents the most advanced optical scanning component of the third-generation LiDAR, and it has competitive advantages. The result showed the two-dimensional control of free-space optical fields at a wavelength of 1,550 nm at a 100 kHz modulation speed, which used dielectric thin film of SiN with an electro-optic response, realizing programmable space-variant control of optical wavefronts in a 32 × 4 pixel array at high speed. The 2D beam steering around a 30° × 2.5° field of view with the beam widths of 1.0° × 0.6°. We will provide custom solid-state LiDARs to clients, and these LiDARs will be more cost-effective than the commercial LiDAR products and will become more receptive by the autonomous vehicle market.
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