Mr. Chun-Hung Chen Profile

Chun-Hung Chen

at Taiwan Semiconductor Manufacturing Co. Ltd.

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Realizing EUV photomask defectivity qualification by actinic mask review system

Jiun-Lung Lu, Chien-Hsing Lu, Hsin-Fu Tseng, Vincent C. Wen, Chun-Hung Chen, Yi-An Huang, Yung-Sheng Chang, Sagar Trivedi, Danping Peng, Takayuki Morisawa, Hiroki Miyai

Proceedings Volume 12751, 127510P (2023) https://doi.org/10.1117/12.2688176

KEYWORDS: Extreme ultraviolet, Photomasks, Reticles, Printing, Semiconductors, Semiconducting wafers, Integrated circuits, Source mask optimization, Risk assessment, Reliability

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