Cong Huang
at East China Univ of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2017 Presentation + Paper
Cong Huang, Hong-Bo Zhang, Katharina K. C. Koch, Rui-Xue Yin, Wen-Jun Zhang
Proceedings Volume 10061, 100610Y (2017) https://doi.org/10.1117/12.2251279
KEYWORDS: Silicon, Liquids, Semiconducting wafers, Intelligence systems, Photoresist materials, Photomasks, Photomicroscopy, Complex systems, Microfluidics, Ultrasonography, Ultrasonics, Optical lithography, BioMEMS, Microsystems

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