Retinal prosthesis projects around the world have been pursuing a functional replacement system for those with retinal degeneration. In this paper, we will outline the concept for a micromachined conformal electrode array and present preliminary fabrication results. Individual electrodes are designed to float on micromachined springs on a substrate that will enable the adjustment of spring constants and therefore contact force by adjusting the dimensions of the springs at each electrode. This will also allow us to accommodate the varying curvature/topography of the retina. We believe that this approach will provide several advantages by improving the electrode/tissue interface as well as generating some new options for in-situ measurements and overall system design.
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Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
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