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Dr. Danilo Vrtacnik
Senior Researcher at Univ v Ljubljani
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Author
Publications (4)
Proceedings Article | 4 January 2006 Paper
Silicon dry etching profile control by RIE at room temperature for MEMS applications
D. Vrtacnik, D. Resnik, U. Aljancic, M. Mozek, S. Amon
Proceedings Volume 6037, 603720 (2006) https://doi.org/10.1117/12.638701
KEYWORDS: Etching, Silicon, Oxides, Reactive ion etching, Ions, Oxygen, Plasma, Microelectromechanical systems, Anisotropic etching, Dry etching
Proceedings Article | 2 April 2004 Paper
Micromachined crystal plane on (100) and (110) silicon for optical mirror applications
Drago Resnik, Danilo Vrtacnik, Uros Aljancic, Slavko Amon
Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.524761
KEYWORDS: Mirrors, Silicon, Etching, Crystals, Scattering, Anisotropy, Light scattering, Laser scattering, Reflectivity, Semiconducting wafers
Proceedings Article | 28 September 2001 Paper
Properties of (311) planes anisotropically etched in (100) silicon by TMAH
Drago Resnik, Danilo Vrtacnik, Uros Aljancic, Matej Mozek, Slavko Amon
Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442976
KEYWORDS: Etching, Silicon, Plasma enhanced chemical vapor deposition, Surface roughness, Oxides, Radium, Scanning electron microscopy, Micromachining, Ultrasonography, Thin films
Proceedings Article | 28 September 1999 Paper
Silicon ultraviolet photodiode processing via integrated MOS capacitors
Danilo Vrtacnik, Drago Resnik, Dejan Krizaj, Slavko Amon
Proceedings Volume 3818, (1999) https://doi.org/10.1117/12.364155
KEYWORDS: Silicon, Oxides, Photodiodes, Ultraviolet radiation, Capacitors, Molybdenum, Semiconducting wafers, Numerical simulations, Quantum efficiency, Diffusion
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