Dr. David W. Doerr Profile

Dr. David W. Doerr

Product Development Engineer at Bruker Nano

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Publications (6)

Proceedings Article | 17 April 2012 Paper

Through pellicle management of haze formation in a wafer fabrication environment

Alexander Figliolini, Michael Archuletta, Jeff LeClaire, David Brinkley, David Doerr, Roy White, Ron Bozak, David Lee

Proceedings Volume 8352, 83520R (2012) https://doi.org/10.1117/12.918378

KEYWORDS: Air contamination, Photomasks, Pellicles, Particles, Reticles, Semiconducting wafers, Image processing, Lithography, Inspection, Quartz

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Proceedings Article | 16 October 2006 Paper

Optical communications with femtosecond lasers

Jianchao Li, Haifeng Zhang, David Doerr, Dennis Alexander

Proceedings Volume 6399, 639908 (2006) https://doi.org/10.1117/12.690618

KEYWORDS: Aerosols, Polarization, Femtosecond phenomena, Silica, Mode locking, Beam splitters, Atmospheric particles, Pulsed laser operation, Clouds, Continuous wave operation

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Proceedings Article | 21 January 2006 Paper

Experimental observation of diffraction of ultrashort laser pulses by a single slit

Haifeng Zhang, Jianchao Li, Dennis Alexander, Dave Doerr, Nageswara Rao Tadepalli

Proceedings Volume 6103, 610318 (2006) https://doi.org/10.1117/12.648298

KEYWORDS: Diffraction, Pulsed laser operation, Ultrafast phenomena, Continuous wave operation, Femtosecond phenomena, Optical simulations, Near field diffraction, Near field optics, Silica

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Proceedings Article | 12 April 2005 Paper

Monitoring steam laser cleaning using optical probe techniques

Nagaraj Batta, Yongfeng Lu, Xinwei Wang, Jing Shi, Daniel Thompson, David Doerr, Dennis Alexander

Proceedings Volume 5713, (2005) https://doi.org/10.1117/12.593956

KEYWORDS: Silicon, Particles, Excimer lasers, Toxic industrial chemicals, Aluminum, Thin films, FT-IR spectroscopy, Semiconductor lasers, Silicon carbide, Nitrogen

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Proceedings Article | 13 September 2002 Paper

Femtosecond laser drilling of high-aspect-ratio 1-micron holes in silicon

Dennis Alexander, B. Mihulka, David Doerr

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482107

KEYWORDS: Femtosecond phenomena, Silicon, Scanning electron microscopy, Particles, Laser drilling, Semiconductor lasers, Metals, Laser ablation, Plasma, Laser systems engineering

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Showing 5 of 6 publications

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