Mr. David Willenborg Profile

David Willenborg

Vice President/Engineering

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Publications (3)

Proceedings Article | 1 March 1994 Paper

Novel technique for performing ellipsometric measurements in a submicrometer area

Jeffrey Fanton, Jon Opsal, Allan Rosencwaig, David Willenborg

Proceedings Volume 2004, (1994) https://doi.org/10.1117/12.172605

KEYWORDS: Reflectivity, Oxides, Phase measurement, Sensors, Interferometry, Thin films, Calibration, Polarization, Silicon, Semiconductors

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Proceedings Article | 1 January 1992 Paper

Effects of feature edges on thickness readings of thin oxides

Jon Opsal, David Willenborg, Jeffrey Fanton, Susan Kelso, Jim Simmons, Allan Rosencwaig

Proceedings Volume 1594, (1992) https://doi.org/10.1117/12.56645

KEYWORDS: Oxides, Reflectivity, Semiconducting wafers, Spectrophotometry, Light scattering, Scattering, Reflectometry, Process control, Dielectrics, Laser scattering

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Proceedings Article | 1 January 1992 Paper

Novel microspot dielectric film thickness measurement system

David Willenborg, Susan Kelso, Jon Opsal, Jeffrey Fanton, Allan Rosencwaig

Proceedings Volume 1594, (1992) https://doi.org/10.1117/12.56646

KEYWORDS: Sensors, Refractive index, Reflectometry, Semiconducting wafers, Process control, Spectrophotometry, Microscopes, Objectives, Dielectrics, Optical testing

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