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Emrah Uluz
at Fraunhofer-Institute for Laser Technology ILT
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 15 July 2022 Paper
Investigation on process stability of laser beam figuring for single nanometer ablation on fused silica
Proceedings Volume 12298, 122980F (2022) https://doi.org/10.1117/12.2632797
KEYWORDS: Laser ablation, Silica, Annealing, Gas lasers, Laser processing, Carbon monoxide, Glasses, Polishing, Image processing, Pulsed laser operation
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